Part Number	QTY	Description	Process
0010-09015	1	Floppy Drive, assy.	5000
0010-09195	1	Robot, asmb.	5000
0010-09297	1	15 Volt Power Supply, assy.	5000
0010-09867	1	Temp Sensor H20, Assy.C16	5000
0010-09881	1	Bracket, Remote Assy,.	5000
0010-10141	1	Wafer Position Sensor	5000
0010-70019	1	Pump Assy, Heat Exchanger	5000
0010-70191	1	Slit Valve	5000
0010-70614	1	Assy Slit  Valve, Metal Etch,Viton	5000
0020-09152	1	Bracket, Rotation Motor	5000
0020-09284	1	Flag, Comb Sensor	5000
0020-09297	1	Bracket, Vertical Plate Mount	5000
0020-10194	1	Plate, Elevator Tray Tower	5000
0020-32837	1	Hinge	5000
0020-76062	1	Drive, Shaft Robot	5000
0030-09026	1	Tray, Elevator 200 mm	5000
0040-04210	1	Clip,  Box Mount	5000
0240-31632	1	Kit, Wafer Position Sensor	5000
1140-01045	1	Power Supply 15vol	5000
4020-01259	1	Filter	5000
0010-09843	2	Manifold, Insulation  H20 Vdsll	5000
0020-09188	2	Shoe, Front 125MM	5000
0020-09521	2	Boomerang Box Cover	5000
0020-10202	2	Plate, Elevator Tray Upper	5000
0020-10518	2	Pedestal, Thick Graphite	5000
0020-34299	2	Flang Insulator Unibody	5000
0020-76065	2	IDLE GEAR ROBOT DRIVE	5000
0090-70001	2	Motor, assy.	5000
0240-10424	2	Kit, Lockout	5000
0240-10857	2	Kit, Remote EV/Elec.	5000
0240-31598	2	Kit, Shield Panel	5000
0240-32336	2	Kit, EV assy.	5000
0020-09111	5	Retainer Seal	5000
0020-32837	5	Hinge	5000
0020-31874	6	Cover	5000
0090-70005	6	Switch, assy.	5000
0010-10045	7	Pump Stack Htr. AC, Assy.	5000
0020-31901	7	Cover	5000
0020-76183	7	Door	5000
0020-09523	12	Pin, Slit Valve Chamber	5000
0090-70000	12	Motor, assy.	5000
0020-70433	42	Hinge	5000
0020-09116	46	Slit Valve	5000
0020-70432	57	Hinge	5000
0020-10891	115	Screw	5000