Part Number	QTY	Description	Process
0010-00138	1	Upper Frame, AC Distribution Assy.	8300
0010-00343	1	Pedestal, 125 mm	8300
0010-00388	1	Pedestal	8300
0010-00212	2	Robot, assy.	8300
0010-00410	2	Gripper, Assy.	8300
0020-00730	2	Geneva Wheel	8300
0020-04259	2	Pedestal, 100mm	8300
0040-00103	2	Bellows Actuator	8300
0225-05714	2	Blank-Off	8300
3020-01032	2	Air Cylinder	8300
0190-00052	3	Pedestal, Assy.	8300
0270-00142	3	Loader Alignment Tool Kit	8300
0010-00339	4	Pedestal	8300
0020-04259	5	Pedestal, 100mm	8300
0030-01007	6	Cover	8300
0020-04356	22	Blade	8300
0030-01019	22	OVLAY	8300
0060-00187	23	Position Sensor	8300
0030-01037	30	Wafer Clip	8300
0030-00242	32	Screw Cover	8300
0030-00156	45	Focus Ring	8300
0030-00217	46	Screw Cover	8300
0030-00169	50	Clip, Pedestal	8300
0030-00171	50	Stop, Upper	8300
0030-00192	50	Upper, Stop	8300
0030-00214	52	Ring, Pedestal	8300
0030-00212	72	Bottom Wafer	8300
0030-01005	96	Spacer	8300
0030-00207	100	Stop, Upper 150 mm Oxide	8300
0030-00208	100	Lower, 150 mm Oxide	8300
0030-00210	100	Lower, 125 mm Oxide	8300
0010-00339	113	Pedestal	8300
0030-00137	125	Screw Cover, 1/4-20	8300
0030-00193	134	Button	8300
0020-03553	154	Cover, Screw 1/4-20	8300
0030-00216	200	Screw Cover, 1/4-20	8300
0010-00840	210	Clip, Assy.	8300
0030-00173	360	Clip	8300
0030-00209	624	Upper, 125 mm Oxide	8300
0010-00805	871	Clip, Pedestal	8300
0020-06998	6362	Buttons	8300