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| Part Number | QTY | Description | Process |
| 0010-09487 | 1 | Endpoint Detector/Sensor | ASP/PRSP |
| 0010-39474 | 1 | Wafer Lift Assy. | ASP/PRSP |
| 0020-30869 | 1 | Tuning Rod | ASP/PRSP |
| 0020-30870 | 1 | Tuning Sleeve | ASP/PRSP |
| 0020-31292 | 1 | Center Chamber Wall | ASP/PRSP |
| 0021-35820 | 1 | Hoop, Chuck | ASP/PRSP |
| 0021-39519 | 1 | Hoop Chuck | ASP/PRSP |
| 0040-36758 | 1 | Applicator | ASP/PRSP |
| 0140-10046 | 1 | Cable, Assy. | ASP/PRSP |
| 0140-10108 | 1 | Harness, Assy. | ASP/PRSP |
| 0200-00149 | 1 | Applicator Tube | ASP/PRSP |
| 0200-09212 | 1 | Window | ASP/PRSP |
| 0200-09270 | 1 | TC, quartz | ASP/PRSP |
| 0200-09478 | 1 | Plate, Gas Dist. Upper 200mm | ASP/PRSP |
| 0200-09199 | 2 | Tube, Plasma Quartz | ASP/PRSP |
| 0200-09202 | 2 | Plasma, Tube Ceramic | ASP/PRSP |
| 0200-09336 | 2 | Gas Distribution Plate | ASP/PRSP |
| 0200-09337 | 2 | Gas Distribution Cover | ASP/PRSP |
| 0200-35599 | 2 | Tube, ASP | ASP/PRSP |
| 1380-01003 | 2 | Magnetron + C745 | ASP/PRSP |
| 0010-09610 | 3 | TC/ Wafer Support Assy. | ASP/PRSP |
| 0200-09200 | 3 | Gas Distribution Plate | ASP/PRSP |
| 0200-09432 | 4 | Tube, Plasma | ASP/PRSP |
| 0015-09209 | 5 | Bellows | ASP/PRSP |
| 0020-30988 | 5 | Adaptor, Top Cover | ASP/PRSP |
| 0190-09185 | 5 | Thermocouple, 200 mm | ASP/PRSP |
| 0020-31288 | 6 | Top Lid Adapter | ASP/PRSP |
| 0090-35118 | 8 | Electrical Assy. | ASP/PRSP |
| 0200-09432 | 13 | Tube, Plasma | ASP/PRSP |
| 0200-09199 | 14 | Tube, Plasma Quartz | ASP/PRSP |
| 0020-31501 | 24 | Finger | ASP/PRSP |
| 0200-09432 | 24 | Tube, Plasma | ASP/PRSP |
| 0200-09432 | 31 | Tube, Plasma | ASP/PRSP |