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| Part Number | QTY | Description | Process |
| 0010-75197 | 1 | Blade, 200mm Qtz. | Centura |
| 0010-75512 | 1 | 8in Buffer Blade/Wrist Assy | Centura |
| 0020-19001 | 1 | Spacer, Spacer | Centura |
| 0020-76909 | 1 | Blade, 200 mm | Centura |
| 0200-35004 | 1 | Blade, Qtz. | Centura |
| 0200-35693 | 1 | Blade, Ceramic | Centura |
| 0200-35693 | 1 | Blade, Ceramic | Centura |
| 0200-36679 | 1 | Blade, 200 mm | Centura |
| 0242-13030 | 1 | Kit, Wafer Mapping | Centura |
| 0010-75173 | 2 | Door | Centura |
| 0010-76428 | 2 | Slit Valve | Centura |
| 0010-76859 | 2 | Fast Wafer Mapping, Lt. | Centura |
| 0020-70644 | 2 | Plug, Interface | Centura |
| 0200-35159 | 2 | Baffle, Inject 3 Zone | Centura |
| 0010-70334 | 3 | Screen Baffle, Assy. | Centura |