Part Number	QTY	Description	Process
0010-09063	1	Susceptor, Assy.	CVD
0010-09114	1	Nitride/Oxide Head, Assy.	CVD
0010-09174	1	Throttle Valve, Assy.	CVD
0010-09348	1	Throttle Valve, Universal	CVD
0010-09400	1	Susceptor, BWCVD 150mm	CVD
0010-09463	1	Susceptor, Assy.	CVD
0010-09786	1	Susceptor, BWCVD 150mm	CVD
0010-09982	1	Throttle Valve	CVD
0010-10036	1	Susceptor, Teos 200mm	CVD
0010-10082	1	Throttle Valve, Assy.	CVD
0010-10128	1	Susceptor, Assy.	CVD
0010-10898	1	Susceptor	CVD
0010-30001	1	Degasser, Assy.	CVD
0010-37148	1	Throttle, Assy.	CVD
0010-37267	1	P-Chuck Assy 150mm	CVD
0010-60007	1	Susceptor, Assy.	CVD
0015-09042	1	Resistor, Ceramic	CVD
0020-03581	1	Hinge, Pivot	CVD
0020-09430	1	Collimator	CVD
0020-09533	1	Handle, Gas Box	CVD
0020-09545	1	Filter, Slit Window	CVD
0020-09748	1	Bracket	CVD
0020-10162	1	Diffuser	CVD
0020-10188	1	Levelling Pin 200mm	CVD
0020-10189	1	Plate Connector	CVD
0020-10700	1	Plug, Throttle Valve	CVD
0020-10732	1	Plumping Plate	CVD
0020-10739	1	Collimator, Outer WCVD	CVD
0020-10943	1	Isolator	CVD
0020-30101	1	Top Plate, Gas Box	CVD
0020-30107	1	Perf. Plate, 150mm	CVD
0020-30110	1	Collimator, Outer 200mm	CVD
0020-30110	1	Collimator, Outer 200mm	CVD
0020-30486	1	Sensor Cap, Modified	CVD
0020-30586	1	Collimator, Outer	CVD
0020-30602	1	Pumping Plate, 200mm	CVD
0020-30920	1	Susceptor Arm	CVD
0020-31281	1	Hinge	CVD
0020-31572	1	Blocker Plate	CVD
0020-33355	1	Shaft Hinge	CVD
0020-33538	1	Plat, Perf Ox 200mm, unanodiz	CVD
0020-34682	1	Lever, Ratchet DxZ	CVD
0020-42068	1	Plate Nut, Susceptor Arm	CVD
0020-42269	1	Lift Ring	CVD
0021-02469	1	Insert, Liner Exhaust	CVD
0021-35744	1	Plate, Blocker	CVD
0021-35752	1	Shield, Inner	CVD
0021-35869	1	Perf Plate	CVD
0021-35944	1	Shield, Outer	CVD
0021-36686	1	Window	CVD
0040-09095	1	Gas Box	CVD
0040-09096	1	Vacuum Port, 200mm	CVD
0040-09308	1	Plate, Susceptor	CVD
0040-09407	1	Weldment	CVD
0040-31981	1	Lift Ring	CVD
0040-35132	1	Chamber, Body	CVD
0150-09265	1	Cable Assy, Amp Heater	CVD
0190-09110	1	Specification Kit	CVD
0190-09553	1	Ball Screw,  Assy.	CVD
0200-09021	1	Shield	CVD
0200-09035	1	Pin, wafer lift 150 mm	CVD
0200-09046	1	Susceptor Arm	CVD
0200-09231	1	Support, Susceptor	CVD
0200-09233	1	Arm Susceptor	CVD
0200-09266	1	Shadow Ring, Inner	CVD
0200-09278	1	Ring, Inner	CVD
0200-09281	1	Ring, Inner	CVD
0200-09317	1	Ring, Inner	CVD
0200-09358	1	Susceptor Arm	CVD
0200-09441	1	Window Slit	CVD
0200-09450	1	Tube, Gas Feed	CVD
0200-09511	1	Adaptor Ring	CVD
0200-09615	1	Lift, Ceramic Wafer	CVD
0200-09691	1	Ring, Lift	CVD
0200-09772	1	Filter, Slit Window Quartz	CVD
0200-09965	1	Universal Arm	CVD
0200-09974	1	Pumping Insert Shield	CVD
0200-09994	1	Ring, Inner	CVD
0200-10003	1	Ring, Inner	CVD
0200-10074	1	Lift Pin	CVD
0200-10112	1	TC Keeper, Ceramic	CVD
0200-10170	1	Window	CVD
0200-10170	1	Window	CVD
0200-10173	1	Cover Plate	CVD
0200-10178	1	Collar Base	CVD
0200-10192	1	Shield	CVD
0200-10204	1	Pin, Wafer Lift	CVD
0200-10348	1	Heater Window	CVD
0200-18019	1	Kit, Process Cover	CVD
0200-18067	1	Insulator	CVD
0200-18067	1	Insulator	CVD
0200-35208	1	Shaft, Susceptor	CVD
0200-35576	1	Isolator Lid, TXZ	CVD
0200-35596	1	Window	CVD
0200-35690	1	Susceptor,  Solid Pin 200 mm	CVD
0200-35785	1	Ring	CVD
0200-35862	1	Window, Slit	CVD
0200-36780	1	Insulator, Pumping Ring	CVD
0200-39361	1	Pumping Isolator	CVD
0240-33569	1	Shield	CVD
0240-37974	1	Kit, Clamp SACVD	CVD
0242-35625	1	Kit, Basic Heater	CVD
0270-20208	1	Alignment Tool	CVD
3870-02310	1	Isolation Valve	CVD
0010-09837	2	Wafer Lift, Assy.	CVD
0010-10638	2	Susceptor	CVD
0010-30245	2	Susceptor, 200mm WSIX	CVD
0010-30402	2	Drive, Assy.	CVD
0020-09136	2	Hanger, Lamp Module	CVD
0020-09749	2	Bracket	CVD
0020-10119	2	Perf. Plate, 100-150mm Nitride	CVD
0020-10573	2	Collimator, Inner WCVD	CVD
0020-10702	2	Seal Retainer	CVD
0020-30335	2	Housing	CVD
0020-30485	2	Sensor Flange	CVD
0020-30797	2	Perf Plate, 200mm	CVD
0020-30885	2	Sleeve	CVD
0020-31154	2	Seal, Sleeve bellows	CVD
0020-34731	2	Lid, Pumping Plant	CVD
0020-34755	2	Insert	CVD
0020-42069	2	Screw	CVD
0020-42162	2	Sleeve, Gas Tube	CVD
0021-09758	2	Manifold, Output DxZ	CVD
0021-35744	2	Plate, Blocker	CVD
0021-35988	2	Filter, Slit Window	CVD
0021-36302	2	Blocker Plate	CVD
0021-37290	2	Ceramic, CVD	CVD
0040-03083	2	Heater Weldment	CVD
0190-35370	2	Thermocouple	CVD
0200-09121	2	Shield, Ceramic 100-150mm	CVD
0200-09182	2	Pumping Plate 200mm	CVD
0200-09429	2	Window, Quartz	CVD
0200-09441	2	Window Slit	CVD
0200-09716	2	Pin Lift, Heater	CVD
0200-10118	2	Arm, Plasma Chuck	CVD
0200-10122	2	Ring, Isolator	CVD
0200-10155	2	Adapter Ring, Nitride	CVD
0200-10196	2	Shield	CVD
0200-35208	2	Shaft, Susceptor	CVD
0200-35579	2	Insert	CVD
0200-35785	2	Ring	CVD
0200-36092	2	Window, 300 mm	CVD
0200-36524	2	Lid, Liner	CVD
3870-02202	2	Vaporizer	CVD
3870-02238	2	Valve Injection W/Heater	CVD
0010-09125	3	Head Assy.	CVD
0010-60012	3	Susceptor, BWCVD 100mm	CVD
0010-76174	3	Throttle Valve Dual, Assy.	CVD
0020-10141	3	Pumping, Plate	CVD
0020-10204	3	Plate, Susceptor	CVD
0020-10889	3	Screw	CVD
0020-30076	3	Bellows	CVD
0020-30402	3	Support Arm, Top Mount	CVD
0021-02468	3	Liner, Exhaust	CVD
0021-03488	3	Face Plate, 200 mm	CVD
0021-30486	3	Sensor Cap	CVD
0190-09372	3	Thermocouple, WXZ	CVD
0190-35511	3	Thermocouple	CVD
0200-09072	3	Ceramic Shield	CVD
0200-09135	3	Adapter, Plumbing Plate	CVD
0200-09158	3	Heater Window, Quartz	CVD
0200-09442	3	Lift Hoop	CVD
0200-09691	3	Ring, Lift	CVD
0200-10193	3	Shield, Common Silane 150 mm	CVD
0200-35420	3	Arm Susceptor, Tin-Xp	CVD
0200-35596	3	Window	CVD
1400-01109	3	Calibration Head	CVD
0010-10272	4	Susceptor, Assy.	CVD
0010-10632	4	Susceptor	CVD
0010-60019	4	Susceptor, Shdw. Ring 100 mm	CVD
0020-09924	4	Support, Susceptor Arm	CVD
0020-30602	4	Pumping Plate, 200mm	CVD
0020-30983	4	Plate, Pumping	CVD
0020-30999	4	Centering Tool, 100mm	CVD
0020-31019	4	Perf. Plate, 200 mm	CVD
0020-31132	4	Aluminum Screw	CVD
0020-31132	4	Aluminum Screw	CVD
0190-35511	4	Thermocouple	CVD
0200-09135	4	Adapter, Plumbing Plate	CVD
0200-09525	4	Pin, Wafer Lift 200mm	CVD
0200-10074	4	Lift Pin	CVD
0200-10284	4	Lift Pin	CVD
0200-18067	4	Insulator	CVD
0200-18093	4	Nozzle	CVD
0200-35576	4	Isolator Lid, TXZ	CVD
0010-10272	5	Susceptor, Assy.	CVD
0010-60013	5	Susceptor, BWCVD 125mm	CVD
0020-09996	5	Shim Ring	CVD
0020-10117	5	Perf. Plate	CVD
0020-25251	5	Honey Comb	CVD
0020-30058	5	Blocker Plate, 200mm	CVD
0020-31019	5	Perf. Plate, 200 mm	CVD
0021-35988	5	Filter, Slit Window	CVD
0040-31985	5	Bellows	CVD
0190-09497	5	Thermocouple	CVD
0190-35413	5	Thermocouple	CVD
0190-35510	5	Endpoint Detector	CVD
0200-09146	5	Pin Wafer lift	CVD
0200-09996	5	Ring, Outer	CVD
0200-15004	5	Shield	CVD
0010-09786	6	Susceptor, BWCVD 150mm	CVD
0010-09818	6	Susceptor, 100mm	CVD
0021-02395	6	Insert Ring	CVD
0200-09996	6	Ring, Outer	CVD
0200-10006	6	Wafer, Aln. Wxz.	CVD
0200-10348	6	Heater Window	CVD
0200-18085	6	Nozzle, Ceramic	CVD
0200-35611	6	Screw, Lid Liner	CVD
0200-36415	6	Pumping Ring	CVD
0200-36416	6	Pumping Ring	CVD
0200-36417	6	Pumping Ring	CVD
0200-36418	6	Cover	CVD
0020-10192	7	Ring, Wafer Lift	CVD
0020-30338	7	Seal, Throttle Valve	CVD
0020-30895	7	Screw	CVD
0190-09061	7	Seal, Window	CVD
0200-09036	7	Pin, Wafer Lift	CVD
0200-09071	7	Lift Pin	CVD
0015-09055	8	Bellows, Assy. Susceptor Lift	CVD
0020-09658	8	Clamp, Gas Box	CVD
0020-10042	9	Plate, Floating Head	CVD
0020-30338	9	Seal, Throttle Valve	CVD
0020-31020	9	Blocker Plate	CVD
0190-09372	9	Thermocouple, WXZ	CVD
0200-09035	9	Pin, wafer lift 150 mm	CVD
0020-09545	10	Filter, Slit Window	CVD
0020-31020	10	Blocker Plate	CVD
0040-09668	10	Weldment, Bellows	CVD
0190-09475	10	End Point Detector	CVD
0200-09185	10	Pin, Wafer lift 150 mm	CVD
0200-09266	10	Shadow Ring, Inner	CVD
0200-18093	11	Nozzle	CVD
0020-10729	12	Hanger, Lamp Module	CVD
0021-35987	12	RF Strap	CVD
0190-09141	12	Thermocouple	CVD
0190-09526	12	Sensor	CVD
0200-09716	12	Pin Lift, Heater	CVD
0200-15005	12	Pin, Wafer Lift 100 mm	CVD
0020-33339	14	Hinge, Inner	CVD
0200-09002	14	Window, Slit	CVD
0200-09035	14	Pin, wafer lift 150 mm	CVD
0020-10730	15	Clamp, Shield	CVD
0200-09933	16	Pin, Wafer lift, Heater	CVD
0200-09035	17	Pin, wafer lift 150 mm	CVD
0020-10127	20	Bushing	CVD
0200-35611	20	Screw, Lid Liner	CVD
0200-09564	21	Collar Support	CVD
0200-09716	25	Pin Lift, Heater	CVD
0200-35427	29	Rib Insert, 125 mm	CVD
0200-36661	30	Guide Heater Refurb.	CVD
0200-09135	36	Adapter, Plumbing Plate	CVD
0200-09716	36	Pin Lift, Heater	CVD
0015-09329	45	Screw, Button Head	CVD
0200-09071	49	Lift Pin	CVD
0200-18093	50	Nozzle	CVD
0015-09042	53	Resistor, Ceramic	CVD
0020-33341	61	Cap, RF	CVD
0015-09424	70	Throttle Valve	CVD
0200-35281	70	Wafer Lift Pin	CVD
0200-09002	71	Window, Slit	CVD
0200-09772	89	Filter, Slit Window Quartz	CVD
0020-30008	100	Clamp, Shield	CVD
0020-10890	327	Screw	CVD