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| Part Number | QTY | Description | Process |
| 0010-30119 | 1 | Ceramic Dome W/Mounting | DPS |
| 0010-36394 | 1 | Coil, Assy. | DPS |
| 0010-36617 | 1 | RF Feedthrough, Assy. | DPS |
| 0010-37899 | 1 | Window | DPS |
| 0020-39684 | 1 | Coil | DPS |
| 0021-09458 | 1 | Houisng, Inner Cooling | DPS |
| 0021-37135 | 1 | Dome Mounting Ring | DPS |
| 0140-35934 | 1 | Harness, Assy. | DPS |
| 0200-10324 | 1 | Dome/Belljar | DPS |
| 0200-10380 | 1 | Ring, Focus | DPS |
| 0200-35324 | 1 | Ring, 195mm | DPS |
| 0200-35324 | 1 | Ring, 195mm | DPS |
| 0200-35325 | 1 | Focus Ring | DPS |
| 0200-35325 | 1 | Focus Ring | DPS |
| 0200-39137 | 1 | Dome, Ceramic | DPS |
| 3380-01032 | 1 | HE Coil Cooling | DPS |
| 0020-38923 | 2 | Endpoint, Plug | DPS |
| 0200-35267 | 2 | Dome, Ceramic | DPS |
| 0200-35292 | 2 | Window, Endpoint | DPS |
| 0200-39198 | 2 | Inner Gas Feed Nozzle | DPS |
| 0242-38943 | 2 | Retrofit Kit, DPS | DPS |
| 0200-35293 | 3 | Window, Manometer Port | DPS |
| 0200-35334 | 3 | Window, View Poly DPS | DPS |
| 0200-39199 | 3 | Outer Gas Feed Nozzle | DPS |
| 0200-35290 | 4 | Gas, Feed Insert | DPS |
| 0200-35290 | 4 | Gas, Feed Insert | DPS |
| 0200-35296 | 4 | Plug, Inner Gas Feed | DPS |
| 0242-38943 | 4 | Retrofit Kit, DPS | DPS |
| 0020-38851 | 5 | Window | DPS |
| 3420-01080 | 5 | Insulation Blanket | DPS |
| 0010-36202 | 9 | Wafer Pin, Lift | DPS |
| 0040-36986 | 12 | Bellows | DPS |
| 0190-36184 | 13 | Screw. Drive. Nut | DPS |