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| Part Number | QTY | Description | Process |
| 0010-20772 | 1 | Assy., Drive Screw Moto Lift | Endura |
| 0010-76270 | 1 | Robot Blade | Endura |
| 0020-20587 | 1 | Insert, Slit Valve | Endura |
| 0020-23035 | 1 | Cam | Endura |
| 0020-29016 | 1 | Hoop, Orientor Degas | Endura |
| 0030-20045 | 1 | Cover, Pully Magnet | Endura |
| 0050-20099 | 1 | Manifold | Endura |
| 0240-20740 | 1 | Kit, Wafer Mapping | Endura |
| 0240-20741 | 1 | Kit, Wafer Map LLB | Endura |
| 0240-22068 | 1 | Kit, Wafer Mapping | Endura |
| 0240-71178 | 1 | Kit, AR Process | Endura |
| 0240-75896 | 1 | Kit, VHP Mainframe | Endura |
| 0242-02433 | 1 | Kit, Turbo Controller | Endura |
| 0010-20169 | 2 | Phase/Mag, RF Match | Endura |
| 0010-21803 | 2 | Upper DC Housing, Assy. | Endura |
| 0015-20114 | 2 | Sprocket , 45 Teeth | Endura |
| 0020-20340 | 2 | Door | Endura |
| 0020-20342 | 2 | Pivot | Endura |
| 0010-20292 | 3 | LLB Right Detector, Assy. | Endura |
| 0015-20039 | 4 | Motor | Endura |
| 0010-20472 | 5 | Wafer Sensor, Assy. | Endura |
| 0020-20462 | 13 | Viewport Cover | Endura |
| 0020-20462 | 26 | Viewport Cover | Endura |