|
|
| Part Number | QTY | Description | Process |
| 0010-09499 | 1 | Hinge | ETCH |
| 0010-09559 | 1 | Pedestal, Assy. | ETCH |
| 0010-09732 | 1 | Pedestal | ETCH |
| 0010-09917 | 1 | End Point assy. | ETCH |
| 0010-10010 | 1 | Heat Gate Valve, assy. | ETCH |
| 0010-10139 | 1 | Hinge, Assy | ETCH |
| 0010-10758 | 1 | DSGD Lid, Assy. | ETCH |
| 0010-10759 | 1 | Top Lid, SSGD MKII/MxP | ETCH |
| 0010-10995 | 1 | Valve, Soft Pump | ETCH |
| 0010-30059 | 1 | Pedestal | ETCH |
| 0010-70791 | 1 | Lid,Assy.Clamp MxP | ETCH |
| 0010-76994 | 1 | Door, Slit Valve | ETCH |
| 0010-76994 | 1 | Door, Slit Valve | ETCH |
| 0020-01024 | 1 | Window | ETCH |
| 0020-03398 | 1 | Insulation Pipe, quartz | ETCH |
| 0020-03398 | 1 | Insulation Pipe, quartz | ETCH |
| 0020-03412 | 1 | Insert, 125MM Oxide | ETCH |
| 0020-03438 | 1 | Clamp Ring, Qtz. 150mm | ETCH |
| 0020-03438 | 1 | Clamp Ring, Qtz. 150mm | ETCH |
| 0020-04124 | 1 | Cover | ETCH |
| 0020-04131 | 1 | Handle, Insulator | ETCH |
| 0020-04160 | 1 | Spacer, Circular | ETCH |
| 0020-04164 | 1 | Carrier, 200mm | ETCH |
| 0020-04189 | 1 | Adapter, Top | ETCH |
| 0020-04192 | 1 | Hinge Insulator | ETCH |
| 0020-04194 | 1 | Lid, Top | ETCH |
| 0020-04277 | 1 | Insulating, Flange | ETCH |
| 0020-04278 | 1 | Cylinder, Clamping | ETCH |
| 0020-09651 | 1 | Bracket | ETCH |
| 0020-09913 | 1 | Pedestal | ETCH |
| 0020-09933 | 1 | Gas Distribution | ETCH |
| 0020-10527 | 1 | Gas Distribution, Sputter | ETCH |
| 0020-10527 | 1 | Gas Distribution, Sputter | ETCH |
| 0020-30174 | 1 | Clamp | ETCH |
| 0020-30178 | 1 | Sputter Etch Carrier | ETCH |
| 0020-30198 | 1 | Tube, External | ETCH |
| 0020-30205 | 1 | Pedestal | ETCH |
| 0020-30418 | 1 | Ring, Top | ETCH |
| 0020-30710 | 1 | Ring, Clamp | ETCH |
| 0020-30949 | 1 | Pedestal Cover | ETCH |
| 0020-31499 | 1 | Cover | ETCH |
| 0020-31536 | 1 | Gas Distribution Plate | ETCH |
| 0020-31564 | 1 | Rod, Cathode | ETCH |
| 0020-31596 | 1 | Guide, Hinge | ETCH |
| 0020-31597 | 1 | Insulator Handle | ETCH |
| 0020-31626 | 1 | Flange | ETCH |
| 0020-31632 | 1 | Carrier, ESC | ETCH |
| 0020-31638 | 1 | Cover | ETCH |
| 0020-31820 | 1 | Gas Distribution Plate | ETCH |
| 0020-31833 | 1 | Hinge, Bracket | ETCH |
| 0020-32009 | 1 | Strip, Cathode | ETCH |
| 0020-32141 | 1 | Feedthru | ETCH |
| 0020-32142 | 1 | Plug | ETCH |
| 0020-32163 | 1 | Cover, Bottom Pedestal ESC | ETCH |
| 0020-32165 | 1 | ESC, Cover | ETCH |
| 0020-32166 | 1 | Cover, ESC | ETCH |
| 0020-32262 | 1 | Gas Distribution Plate | ETCH |
| 0020-33096 | 1 | Cover, Gas Feed | ETCH |
| 0020-34014 | 1 | Clamp | ETCH |
| 0020-34030 | 1 | Pedestal, ESC | ETCH |
| 0020-34031 | 1 | Pedestal, ESC | ETCH |
| 0020-34035 | 1 | Support Lift Cylinder | ETCH |
| 0020-34113 | 1 | Insulator, Pedestal VLtem | ETCH |
| 0020-34140 | 1 | Gas Distribution Plate | ETCH |
| 0020-34142 | 1 | Chamber Lid | ETCH |
| 0020-34484 | 1 | Shield | ETCH |
| 0020-34684 | 1 | Support, Bellows | ETCH |
| 0020-38884 | 1 | Adapter, Throttle Valve | ETCH |
| 0021-09016 | 1 | Wafer Transfer Lid, MXP+ | ETCH |
| 0021-09426 | 1 | Bracket, Endpoint | ETCH |
| 0021-09780 | 1 | Thermal Foil | ETCH |
| 0021-10642 | 1 | Housing | ETCH |
| 0021-38137 | 1 | Protection Cover | ETCH |
| 0040-00248 | 1 | Port Screen, Turbo Pump | ETCH |
| 0040-09002 | 1 | Chamber Body, Etch | ETCH |
| 0040-09255 | 1 | Pedestal, 200mm | ETCH |
| 0040-31846 | 1 | Cover | ETCH |
| 0040-31886 | 1 | Shield, RT | ETCH |
| 0040-32042 | 1 | Base Weldment | ETCH |
| 0050-30759 | 1 | Cover, Gas Inlet | ETCH |
| 0090-00033 | 1 | End Point Detector | ETCH |
| 0090-09102 | 1 | Window, Assy. C322 | ETCH |
| 0090-09124 | 1 | Window, Assy. | ETCH |
| 0090-09125 | 1 | Window, Assy. | ETCH |
| 0090-35112 | 1 | Esc. Assy 195MM Flat | ETCH |
| 0100-09154 | 1 | Assy Multi Emission Endpoint | ETCH |
| 0140-10053 | 1 | Cable, Assy. | ETCH |
| 0190-09027 | 1 | Shield, System Elect. | ETCH |
| 0190-70060 | 1 | Magnet Drive Assy | ETCH |
| 0200-00020 | 1 | Ring, quartz 150mm | ETCH |
| 0200-00036 | 1 | Ring, Cover | ETCH |
| 0200-00038 | 1 | Ring, Clamp | ETCH |
| 0200-00042 | 1 | Cover | ETCH |
| 0200-00043 | 1 | Cover Qtz. | ETCH |
| 0200-00050 | 1 | Pedestal Ring | ETCH |
| 0200-00069 | 1 | Clamp Ring | ETCH |
| 0200-00075 | 1 | Cover, Quartz 150mm | ETCH |
| 0200-09024 | 1 | Window, quartz | ETCH |
| 0200-09086 | 1 | Ring, Quartz 200 mm | ETCH |
| 0200-09087 | 1 | Ring, Quartz 150mm | ETCH |
| 0200-09088 | 1 | Ring, Quartz 125mm | ETCH |
| 0200-09179 | 1 | Insulation Pipe, quartz | ETCH |
| 0200-09187 | 1 | Cover | ETCH |
| 0200-09201 | 1 | Gas Distribution Plate | ETCH |
| 0200-09201 | 1 | Gas Distribution Plate | ETCH |
| 0200-09214 | 1 | Pedestal | ETCH |
| 0200-09219 | 1 | Cover Ring | ETCH |
| 0200-09220 | 1 | Ring, Cover | ETCH |
| 0200-09243 | 1 | Cover, pedestal quartz | ETCH |
| 0200-09250 | 1 | Cover, quartz 200mm | ETCH |
| 0200-09303 | 1 | Inner, Ring | ETCH |
| 0200-09303 | 1 | Inner, Ring | ETCH |
| 0200-09307 | 1 | Shield | ETCH |
| 0200-09316 | 1 | Ring, Inner | ETCH |
| 0200-09318 | 1 | Ring, Inner 200mm | ETCH |
| 0200-09331 | 1 | Shield | ETCH |
| 0200-09340 | 1 | Shield | ETCH |
| 0200-09373 | 1 | Cover, quartz 150mm | ETCH |
| 0200-09468 | 1 | Ring, Cover SXTAL | ETCH |
| 0200-09506 | 1 | Cover, quartz 200mm | ETCH |
| 0200-09536 | 1 | Clamp Ring | ETCH |
| 0200-09545 | 1 | Ring, Clamp | ETCH |
| 0200-09558 | 1 | Collar, Quartz 150mm | ETCH |
| 0200-09620 | 1 | Ring, Clamp | ETCH |
| 0200-09638 | 1 | Cylinder, Qtz | ETCH |
| 0200-09657 | 1 | Window | ETCH |
| 0200-09672 | 1 | Clamping Ring | ETCH |
| 0200-09678 | 1 | Focus Ring | ETCH |
| 0200-09686 | 1 | Clamp | ETCH |
| 0200-09762 | 1 | Clamping Ring | ETCH |
| 0200-09769 | 1 | Focus Ring, 125 mm | ETCH |
| 0200-09825 | 1 | Shield | ETCH |
| 0200-09827 | 1 | Pedestal Ring | ETCH |
| 0200-09831 | 1 | Ring, Focus | ETCH |
| 0200-09833 | 1 | Ring, Focus ESC | ETCH |
| 0200-09895 | 1 | Focus Ring | ETCH |
| 0200-09966 | 1 | Collar, Quartz | ETCH |
| 0200-10041 | 1 | Cover, Qtz. | ETCH |
| 0200-10042 | 1 | Cover, Qtz. | ETCH |
| 0200-10147 | 1 | Insert | ETCH |
| 0200-10176 | 1 | Shadow Ring, Quartz | ETCH |
| 0200-10180 | 1 | Qtz. Pipe Lowered Cathode | ETCH |
| 0200-10187 | 1 | Ring | ETCH |
| 0200-10194 | 1 | Shield | ETCH |
| 0200-10218 | 1 | Clamp, Ring 150 mm | ETCH |
| 0200-10231 | 1 | Ring, Clamp Ceramic, 150mm | ETCH |
| 0200-10239 | 1 | Clamp, Ring 200 mm | ETCH |
| 0200-10246 | 1 | Gas Distribution, 88 Holes Qtz. | ETCH |
| 0200-10246 | 1 | Gas Distribution, 88 Holes Qtz. | ETCH |
| 0200-10363 | 1 | Focus Ring | ETCH |
| 0200-10392 | 1 | Window | ETCH |
| 0200-10412 | 1 | Ring, Focus | ETCH |
| 0200-10413 | 1 | Ring, Focus | ETCH |
| 0200-10414 | 1 | Ring, Focus | ETCH |
| 0200-35390 | 1 | Ring | ETCH |
| 0200-35605 | 1 | Focus Ring | ETCH |
| 0200-35801 | 1 | Window, Recessed Endpoint | ETCH |
| 0200-35882 | 1 | Focus Ring | ETCH |
| 0200-36710 | 1 | Ring, Shadow | ETCH |
| 1120-01071 | 1 | Fiber Optic Cable | ETCH |
| 3870-02136 | 1 | Valve | ETCH |
| 3870-02626 | 1 | Valve | ETCH |
| 0010-09919 | 2 | Pedestal, 200mm | ETCH |
| 0010-09936 | 2 | Connector | ETCH |
| 0010-10061 | 2 | Hinge Assy | ETCH |
| 0010-30059 | 2 | Pedestal | ETCH |
| 0010-30059 | 2 | Pedestal | ETCH |
| 0010-70646 | 2 | Lid, Assy MxP + Oxide | ETCH |
| 0020-03431 | 2 | Insert Pedestal, 125mm | ETCH |
| 0020-03597 | 2 | Carrier | ETCH |
| 0020-04036 | 2 | Base, Flange | ETCH |
| 0020-04167 | 2 | Cylinder | ETCH |
| 0020-09601 | 2 | Window | ETCH |
| 0020-30223 | 2 | Plate, Gas Distribution | ETCH |
| 0020-30347 | 2 | Cylinder, External | ETCH |
| 0020-30482 | 2 | Coupling, Flex | ETCH |
| 0020-30608 | 2 | Pedestal, 150mm | ETCH |
| 0020-30723 | 2 | Cylinder | ETCH |
| 0020-31147 | 2 | Insert Base, 150-200mm | ETCH |
| 0020-31488 | 2 | Gas Distribution Plate | ETCH |
| 0020-31492 | 2 | Gas Distribution Plate | ETCH |
| 0020-31510 | 2 | Pedestal | ETCH |
| 0020-31633 | 2 | Lift Pin | ETCH |
| 0020-31658 | 2 | Clamp Ring, 200mm | ETCH |
| 0020-31661 | 2 | Bracket, Symmetrical | ETCH |
| 0020-31752 | 2 | Pedestal 200mm | ETCH |
| 0020-31797 | 2 | Gas Plate, 61 Holes | ETCH |
| 0020-31822 | 2 | Filter, Recessed Endpoint | ETCH |
| 0020-31940 | 2 | Pedestal, AL 200 mm | ETCH |
| 0020-32165 | 2 | ESC, Cover | ETCH |
| 0020-32167 | 2 | Carrier, Wafer Lift | ETCH |
| 0020-34831 | 2 | Plate Mounting | ETCH |
| 0021-09105 | 2 | Lift Pin | ETCH |
| 0021-10019 | 2 | Cover, Bolt | ETCH |
| 0040-00457 | 2 | Fiber Optic Cable | ETCH |
| 0090-00045 | 2 | Control Unit, AC Window | ETCH |
| 0090-09158 | 2 | Electric Assy | ETCH |
| 0090-09244 | 2 | Magnet, Coil | ETCH |
| 0190-35086 | 2 | Bellows | ETCH |
| 0190-35525 | 2 | Thermocouple | ETCH |
| 0200-00019 | 2 | Collar, Pedestal 125 mm | ETCH |
| 0200-00049 | 2 | Ring | ETCH |
| 0200-00410 | 2 | Gas Insert | ETCH |
| 0200-09088 | 2 | Ring, Quartz 125mm | ETCH |
| 0200-09187 | 2 | Cover | ETCH |
| 0200-09219 | 2 | Cover Ring | ETCH |
| 0200-09222 | 2 | Ring, External 200mm | ETCH |
| 0200-09273 | 2 | Ring, Inner 100mm | ETCH |
| 0200-09342 | 2 | Ring, 125 mm | ETCH |
| 0200-09373 | 2 | Cover, quartz 150mm | ETCH |
| 0200-09411 | 2 | Ring Cover,150mm | ETCH |
| 0200-09426 | 2 | Ring, Focus Qtz, 200mm | ETCH |
| 0200-09495 | 2 | Shield | ETCH |
| 0200-09515 | 2 | Cover Ring | ETCH |
| 0200-09589 | 2 | Gas Distribution Plate | ETCH |
| 0200-09628 | 2 | Gas Plate, Qtz. | ETCH |
| 0200-09674 | 2 | Clamp Ring | ETCH |
| 0200-09693 | 2 | Clamp Ring | ETCH |
| 0200-09746 | 2 | Collar | ETCH |
| 0200-09747 | 2 | Clamping Ring | ETCH |
| 0200-09761 | 2 | Clamping Ring | ETCH |
| 0200-09764 | 2 | Collar | ETCH |
| 0200-09920 | 2 | Ring, Clamp | ETCH |
| 0200-10038 | 2 | Ring | ETCH |
| 0200-10039 | 2 | Outer Ring | ETCH |
| 0200-10478 | 2 | Collar | ETCH |
| 0200-35566 | 2 | Clamping Ring | ETCH |
| 0200-35867 | 2 | Applicator Tube | ETCH |
| 0620-01194 | 2 | Fiber Optic Cable | ETCH |
| 0010-09559 | 3 | Pedestal, Assy. | ETCH |
| 0010-10902 | 3 | Connector, HV Module, Assy. | ETCH |
| 0010-70791 | 3 | Lid,Assy.Clamp MxP | ETCH |
| 0020-04058 | 3 | Ring, Pedestal SI 200mm | ETCH |
| 0020-04129 | 3 | Bracket, Top Hinge | ETCH |
| 0020-30196 | 3 | Strip, Contact | ETCH |
| 0020-30342 | 3 | Pedestal | ETCH |
| 0020-30483 | 3 | Clamp Ring, 200mm | ETCH |
| 0020-30566 | 3 | Clamp Ring | ETCH |
| 0020-31275 | 3 | Plug | ETCH |
| 0020-31855 | 3 | Heat Sheild | ETCH |
| 0020-32320 | 3 | Gas Distribution Plate | ETCH |
| 0020-32988 | 3 | Clamp, Vespel | ETCH |
| 0020-34036 | 3 | Rod, RF | ETCH |
| 0020-34911 | 3 | Plug | ETCH |
| 0021-00488 | 3 | Cover | ETCH |
| 0021-09098 | 3 | Ring, Separation | ETCH |
| 0040-09958 | 3 | ESC | ETCH |
| 0090-09143 | 3 | Window, Assy. | ETCH |
| 0200-00058 | 3 | Gas Ring | ETCH |
| 0200-00070 | 3 | Ring | ETCH |
| 0200-09086 | 3 | Ring, Quartz 200 mm | ETCH |
| 0200-09090 | 3 | Ring, Graphite | ETCH |
| 0200-09092 | 3 | Ring, Graphite 125mm | ETCH |
| 0200-09305 | 3 | Shield | ETCH |
| 0200-09423 | 3 | Cover,Quartz 200mm | ETCH |
| 0200-09483 | 3 | Collar | ETCH |
| 0200-09554 | 3 | Cover, Qtz. 200mm | ETCH |
| 0200-09572 | 3 | Collar, SI 200mm | ETCH |
| 0200-09687 | 3 | Ring, Focusing | ETCH |
| 0200-09743 | 3 | Ring, Focusing 150mm | ETCH |
| 0200-09747 | 3 | Clamping Ring | ETCH |
| 0200-09818 | 3 | Ring, Pedestal | ETCH |
| 0200-09840 | 3 | Ring | ETCH |
| 0200-09977 | 3 | Cover | ETCH |
| 0200-10017 | 3 | SGD, outer 1.25" | ETCH |
| 0200-10055 | 3 | Cover Ring, Qtz. 100mm | ETCH |
| 0200-10064 | 3 | Ring | ETCH |
| 0200-35884 | 3 | Focus Ring | ETCH |
| 0020-04142 | 4 | Rim | ETCH |
| 0020-09064 | 4 | Window, Flange | ETCH |
| 0020-30092 | 4 | Ring, External | ETCH |
| 0020-30362 | 4 | Top Ring, 200mm | ETCH |
| 0020-30701 | 4 | Insert | ETCH |
| 0020-31296 | 4 | Screw | ETCH |
| 0020-31304 | 4 | Insert, Outer | ETCH |
| 0020-31343 | 4 | Gas Distribution Plate | ETCH |
| 0020-31804 | 4 | Gas Plate 200MM | ETCH |
| 0021-09105 | 4 | Lift Pin | ETCH |
| 0021-35095 | 4 | Clamp Carrier | ETCH |
| 0090-09143 | 4 | Window, Assy. | ETCH |
| 0190-09459 | 4 | Fiber Optic Cable | ETCH |
| 0200-04180 | 4 | Cover, Quartz 200mm | ETCH |
| 0200-09082 | 4 | Shield | ETCH |
| 0200-09187 | 4 | Cover | ETCH |
| 0200-09188 | 4 | Cover | ETCH |
| 0200-09318 | 4 | Ring, Inner 200mm | ETCH |
| 0200-09468 | 4 | Ring, Cover SXTAL | ETCH |
| 0200-09515 | 4 | Cover Ring | ETCH |
| 0200-09536 | 4 | Clamp Ring | ETCH |
| 0200-09555 | 4 | Focus Ring, quartz 150mm | ETCH |
| 0200-09610 | 4 | Outer Ring, quartz 150mm | ETCH |
| 0200-09626 | 4 | Collar | ETCH |
| 0200-09734 | 4 | Cover | ETCH |
| 0200-09818 | 4 | Ring, Pedestal | ETCH |
| 0200-09835 | 4 | Centering, Ring 200mm | ETCH |
| 0200-09898 | 4 | Plug, Bias | ETCH |
| 0200-18037 | 4 | Collar, Bottom | ETCH |
| 0200-18037 | 4 | Collar, Bottom | ETCH |
| 0200-35884 | 4 | Focus Ring | ETCH |
| 0010-09973 | 5 | Pedestal | ETCH |
| 0020-03423 | 5 | Pedestal, 150 mm | ETCH |
| 0020-03423 | 5 | Pedestal, 150 mm | ETCH |
| 0020-04142 | 5 | Rim | ETCH |
| 0020-04159 | 5 | Pedestal, 200mm | ETCH |
| 0020-04189 | 5 | Adapter, Top | ETCH |
| 0020-30670 | 5 | Pickup | ETCH |
| 0020-31296 | 5 | Screw | ETCH |
| 0020-31600 | 5 | Lid Cover | ETCH |
| 0020-31708 | 5 | Clamp | ETCH |
| 0020-31940 | 5 | Pedestal, AL 200 mm | ETCH |
| 0021-09836 | 5 | Gasket | ETCH |
| 0021-37053 | 5 | Bracket, Endpoint Window | ETCH |
| 0040-00456 | 5 | Fiber Optic Cable | ETCH |
| 0200-00025 | 5 | Gas Ring | ETCH |
| 0200-00047 | 5 | Clamp Ring | ETCH |
| 0200-00058 | 5 | Gas Ring | ETCH |
| 0200-09005 | 5 | Window | ETCH |
| 0200-09091 | 5 | Ring, Graphite | ETCH |
| 0200-09188 | 5 | Cover | ETCH |
| 0200-09483 | 5 | Collar | ETCH |
| 0200-09660 | 5 | Clamp, Qtz. | ETCH |
| 0200-09809 | 5 | Ring, 150mm | ETCH |
| 0200-09833 | 5 | Ring, Focus ESC | ETCH |
| 0200-09920 | 5 | Ring, Clamp | ETCH |
| 0200-10039 | 5 | Outer Ring | ETCH |
| 0200-10202 | 5 | Ring, 200 mm | ETCH |
| 0020-03398 | 6 | Insulation Pipe, quartz | ETCH |
| 0020-03674 | 6 | Sleeve, Centering Clamping | ETCH |
| 0020-30342 | 6 | Pedestal | ETCH |
| 0020-33166 | 6 | Thermal Transfer | ETCH |
| 0020-34040 | 6 | Lift Pin | ETCH |
| 0200-00012 | 6 | Ring, quartz 125mm | ETCH |
| 0200-00013 | 6 | Ring, quartz 150mm | ETCH |
| 0200-00019 | 6 | Collar, Pedestal 125 mm | ETCH |
| 0200-09273 | 6 | Ring, Inner 100mm | ETCH |
| 0200-09636 | 6 | Plug | ETCH |
| 0200-09678 | 6 | Focus Ring | ETCH |
| 0200-09869 | 6 | Clamping Ring | ETCH |
| 0200-35320 | 6 | Focus Ring | ETCH |
| 0200-35801 | 6 | Window, Recessed Endpoint | ETCH |
| 0020-04076 | 7 | Gas Distribution Plate | ETCH |
| 0020-31304 | 7 | Insert, Outer | ETCH |