Part Number	QTY	Description	Process
0200-35019	1	Insert	HTF
0200-35042	1	Dome, Lower	HTF
0200-35007	2	Dome, Upper	HTF
0200-35018	2	Insert, Qtz. Exaust	HTF
0200-35022	2	Graphite, Pre-Heat Ring	HTF
0200-35042	2	Dome, Lower	HTF
0200-35090	2	Wafer Lift, EPI/Poly	HTF
0200-35157	2	SUSC, Poly Back Coat	HTF
0200-35161	2	Liner, Lower	HTF
0200-35162	2	Liner, Upper	HTF
0200-35007	3	Dome, Upper	HTF
0200-35018	4	Insert, Qtz. Exaust	HTF
0200-35160	4	Insert, Qtz. Inject 3 Zone	HTF
0200-36630	5	Heater Cover	HTF
0200-35113	7	Susceptor Rotation	HTF