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| Part Number | QTY | Description | Process |
| 0010-00682 | 1 | Screen, Assy. | Other Items |
| 0010-00685 | 1 | Actuator, Assy. | Other Items |
| 0010-01070 | 1 | Tray, Support Assy. | Other Items |
| 0010-01408 | 1 | Cover, Front Door | Other Items |
| 0010-09806 | 1 | Gas Box | Other Items |
| 0010-09806 | 1 | Gas Box | Other Items |
| 0010-10328 | 1 | Shell Assy. 200MM Flat | Other Items |
| 0010-10776 | 1 | RFG Output Adapter, Assy. | Other Items |
| 0010-10895 | 1 | Power Supply, Assy. | Other Items |
| 0010-13117 | 1 | Automated Lock Assy. | Other Items |
| 0010-13122 | 1 | Lower Sensor, Assy. | Other Items |
| 0010-14024 | 1 | End Effector | Other Items |
| 0010-16144 | 1 | Light Pen Switch, Assy. | Other Items |
| 0010-18213 | 1 | Lockout Valve, Assy. | Other Items |
| 0010-20249 | 1 | Slit Valve Door | Other Items |
| 0010-21264 | 1 | Shutter Linkage, Assy. | Other Items |
| 0010-21566 | 1 | Vat Door Assy | Other Items |
| 0010-26430 | 1 | Motor, Assy. | Other Items |
| 0010-30365 | 1 | Large Tower, Assy. | Other Items |
| 0010-36274 | 1 | Plug | Other Items |
| 0010-36388 | 1 | Lamp Module, Assy. | Other Items |
| 0010-36564 | 1 | Slit Valve Assy. | Other Items |
| 0010-37345 | 1 | Assy. Mag Couple R3.4 | Other Items |
| 0010-37789 | 1 | Edge Ring Purge, Assy. | Other Items |
| 0010-38188 | 1 | Liner | Other Items |
| 0010-38823 | 1 | Valve, Slit Actuator Chemraz | Other Items |
| 0010-75207 | 1 | Laser Optics, Assy. | Other Items |
| 0010-75427 | 1 | Cassette Sensor Assy. | Other Items |
| 0010-76082 | 1 | Hinge | Other Items |
| 0010-76404 | 1 | Slit Valve, Assy. | Other Items |
| 0010-76559 | 1 | Prom, Assy. | Other Items |
| 0010-76765 | 1 | Centerfinder Emisser, Assy. | Other Items |
| 0010-91472 | 1 | Clip | Other Items |
| 0015-00263 | 1 | Hinge | Other Items |
| 0015-09204 | 1 | Valve, Modification | Other Items |
| 0015-09279 | 1 | Detector | Other Items |
| 0020-01145 | 1 | Piston | Other Items |
| 0020-02008 | 1 | Flange | Other Items |
| 0020-03551 | 1 | Pipe, Nipple Feed | Other Items |
| 0020-03607 | 1 | Cover | Other Items |
| 0020-04042 | 1 | Bracket, Water Box | Other Items |
| 0020-04059 | 1 | Window, Round | Other Items |
| 0020-04074 | 1 | Window | Other Items |
| 0020-04190 | 1 | Switch, Clamp | Other Items |
| 0020-04263 | 1 | Shield | Other Items |
| 0020-04478 | 1 | Mounting Strip | Other Items |
| 0020-04483 | 1 | Support Pipe, Upper | Other Items |
| 0020-04484 | 1 | 3 IPE Support Center | Other Items |
| 0020-06425 | 1 | Chamber Mirror, Right | Other Items |
| 0020-06430 | 1 | Screw | Other Items |
| 0020-09082 | 1 | Strap, Ground | Other Items |
| 0020-09083 | 1 | Strap, Capacitor | Other Items |
| 0020-09085 | 1 | Strap Coil | Other Items |
| 0020-09086 | 1 | Shaft Coil | Other Items |
| 0020-09094 | 1 | Coil Parter | Other Items |
| 0020-09237 | 1 | Arm, Pivot | Other Items |
| 0020-09263 | 1 | Cover, Rear | Other Items |
| 0020-09356 | 1 | Plate Cover | Other Items |
| 0020-09787 | 1 | Coupling | Other Items |
| 0020-09816 | 1 | Bracket, Rear Mounting | Other Items |
| 0020-09965 | 1 | Block, Output | Other Items |
| 0020-09966 | 1 | Plate, RF Match | Other Items |
| 0020-09970 | 1 | Strap Output | Other Items |
| 0020-09998 | 1 | Flange, Spacer | Other Items |
| 0020-10098 | 1 | Cover, Plate | Other Items |
| 0020-10718 | 1 | Seal | Other Items |
| 0020-10731 | 1 | Pumping Plate | Other Items |
| 0020-10814 | 1 | Pedestal | Other Items |
| 0020-13652 | 1 | Clamp Viewport Detector | Other Items |
| 0020-14107 | 1 | Base | Other Items |
| 0020-16020 | 1 | Shaft | Other Items |
| 0020-18296 | 1 | Block, Insulated Water Mainfold | Other Items |
| 0020-18332 | 1 | Motor Mount | Other Items |
| 0020-18357 | 1 | Arm Lift | Other Items |
| 0020-18370 | 1 | Insulator Feeder Bias | Other Items |
| 0020-20390 | 1 | Arm, Frog Leg | Other Items |
| 0020-20522 | 1 | Washer | Other Items |
| 0020-20729 | 1 | Viewport | Other Items |
| 0020-20847 | 1 | Bus Bar Main Contactor | Other Items |
| 0020-20882 | 1 | Ground, Strip | Other Items |
| 0020-20967 | 1 | Panel | Other Items |
| 0020-20991 | 1 | Panel | Other Items |
| 0020-21153 | 1 | Bar | Other Items |
| 0020-21487 | 1 | Cover | Other Items |
| 0020-21716 | 1 | Plug | Other Items |
| 0020-21833 | 1 | Viewport Detector | Other Items |
| 0020-22453 | 1 | Tool, Robot Clamp | Other Items |
| 0020-22551 | 1 | Collimator, Bracket Guide | Other Items |
| 0020-22821 | 1 | Cover, Wafer Map | Other Items |
| 0020-22910 | 1 | Bellows | Other Items |
| 0020-23095 | 1 | Bracket | Other Items |
| 0020-23193 | 1 | Trunnion Short Left | Other Items |
| 0020-23235 | 1 | Insert | Other Items |
| 0020-23352 | 1 | Disk Heater | Other Items |
| 0020-24318 | 1 | Mounting Bracket | Other Items |
| 0020-24414 | 1 | Cover, Upper Interlock | Other Items |
| 0020-24798 | 1 | CAM | Other Items |
| 0020-24798 | 1 | CAM | Other Items |
| 0020-25145 | 1 | Cover | Other Items |
| 0020-25344 | 1 | Shield Array Heat | Other Items |
| 0020-26450 | 1 | Plate, End | Other Items |
| 0020-26803 | 1 | Guide, Pin | Other Items |
| 0020-26961 | 1 | Blade | Other Items |
| 0020-27884 | 1 | Shim | Other Items |
| 0020-28561 | 1 | Insulator | Other Items |
| 0020-28622 | 1 | Robot Blade | Other Items |
| 0020-29079 | 1 | Strip, Ground | Other Items |
| 0020-30033 | 1 | Bin/Bulk | Other Items |
| 0020-30172 | 1 | Housing, Endpoint Detector | Other Items |
| 0020-30173 | 1 | Filter,Housing, Endpoint Detector | Other Items |
| 0020-30226 | 1 | Bracket | Other Items |
| 0020-30291 | 1 | H20 Manifold | Other Items |
| 0020-30356 | 1 | Elbow, Gas Supply | Other Items |
| 0020-30382 | 1 | Cap | Other Items |
| 0020-30396 | 1 | Nut | Other Items |
| 0020-30397 | 1 | Stud | Other Items |
| 0020-30398 | 1 | Clamp | Other Items |
| 0020-30886 | 1 | Washer | Other Items |
| 0020-30887 | 1 | Washer | Other Items |
| 0020-30893 | 1 | Retainer Hoop Finger | Other Items |
| 0020-30909 | 1 | Foam Insulator | Other Items |
| 0020-30914 | 1 | Screw | Other Items |
| 0020-31299 | 1 | Housing | Other Items |
| 0020-31505 | 1 | Shower Head | Other Items |
| 0020-31629 | 1 | Insulator, Top | Other Items |
| 0020-31692 | 1 | Elbow, Gas Supply Fitting | Other Items |
| 0020-31838 | 1 | Adapter | Other Items |
| 0020-32011 | 1 | Plate | Other Items |
| 0020-32325 | 1 | Strap | Other Items |
| 0020-32326 | 1 | Capacitor Mount | Other Items |
| 0020-32431 | 1 | Connector Clamp | Other Items |
| 0020-33803 | 1 | Foot Pad, Upper | Other Items |
| 0020-33816 | 1 | Isolator | Other Items |
| 0020-33936 | 1 | Housing | Other Items |
| 0020-33988 | 1 | Bracket, Valve | Other Items |
| 0020-34042 | 1 | Spacer | Other Items |
| 0020-34043 | 1 | Cover | Other Items |
| 0020-34044 | 1 | Block, RF Insulator | Other Items |
| 0020-34046 | 1 | Connector | Other Items |
| 0020-34073 | 1 | Wing | Other Items |
| 0020-34327 | 1 | Guide, Hinge | Other Items |
| 0020-34368 | 1 | Plate | Other Items |
| 0020-34387 | 1 | RF Cap | Other Items |
| 0020-34630 | 1 | Stand, Liquid Injection | Other Items |
| 0020-34739 | 1 | Storage Base | Other Items |
| 0020-34828 | 1 | Encoder | Other Items |
| 0020-34835 | 1 | Bracket | Other Items |
| 0020-35138 | 1 | Cassette Stage | Other Items |
| 0020-36749 | 1 | Clip | Other Items |
| 0020-37066 | 1 | Bracket, H2 Sensor | Other Items |
| 0020-38062 | 1 | Insert | Other Items |
| 0020-38065 | 1 | Cover | Other Items |
| 0020-38065 | 1 | Cover | Other Items |
| 0020-38808 | 1 | Bracket | Other Items |
| 0020-39949 | 1 | Bracket | Other Items |
| 0020-40162 | 1 | Bezel, Control Panel | Other Items |
| 0020-40599 | 1 | Brace, Pump | Other Items |
| 0020-41255 | 1 | Nut | Other Items |
| 0020-41263 | 1 | Aperture | Other Items |
| 0020-42098 | 1 | Door | Other Items |
| 0020-42099 | 1 | Plate | Other Items |
| 0020-42102 | 1 | Shim, Teos Lift | Other Items |
| 0020-42103 | 1 | Wafer Lift, TEOS | Other Items |
| 0020-51405 | 1 | Insert | Other Items |
| 0020-70464 | 1 | Plate | Other Items |
| 0020-70608 | 1 | Vaccum Port Cover | Other Items |
| 0020-75388 | 1 | Hinge | Other Items |
| 0020-75791 | 1 | Cover | Other Items |
| 0020-75988 | 1 | Lift Hoop | Other Items |
| 0020-76000 | 1 | Flap, Throttle | Other Items |
| 0020-76159 | 1 | Bracket | Other Items |
| 0020-76449 | 1 | Bracket | Other Items |
| 0020-76690 | 1 | Mount, Door | Other Items |
| 0020-76733 | 1 | Cap | Other Items |
| 0020-78709 | 1 | Gimbal Rod | Other Items |
| 0020-79091 | 1 | Wafer Ring | Other Items |
| 0020-81549 | 1 | Spacer | Other Items |
| 0020-89025 | 1 | Reflector | Other Items |
| 0020-89991 | 1 | Supprt Wire | Other Items |
| 0021-01285 | 1 | Reflector | Other Items |
| 0021-01550 | 1 | Pin, Ceramic | Other Items |
| 0021-06092 | 1 | Door, Slit Liner | Other Items |
| 0021-06924 | 1 | Clamp | Other Items |
| 0021-09724 | 1 | Strap, RF | Other Items |
| 0021-22107 | 1 | Blade | Other Items |
| 0021-35168 | 1 | Panel | Other Items |
| 0021-35706 | 1 | Clamp, Dome | Other Items |
| 0021-35829 | 1 | Plate, Adaptor | Other Items |
| 0021-35920 | 1 | Housing | Other Items |
| 0021-36151 | 1 | Control, Flow Assy. | Other Items |
| 0021-36152 | 1 | Feedthru, Assy. | Other Items |
| 0021-36154 | 1 | Feedthru Adapter | Other Items |
| 0021-36889 | 1 | Bracket | Other Items |
| 0021-76026 | 1 | Deposition Ring | Other Items |
| 0030-70044 | 1 | Slit Valve, Mount Door | Other Items |
| 0030-70046 | 1 | BRCT, Clamp Source | Other Items |
| 0030-70055 | 1 | Chamber Body | Other Items |
| 0040-00332 | 1 | Can, Sealing Right | Other Items |
| 0040-00366 | 1 | Screen Ease | Other Items |
| 0040-06380 | 1 | Plate | Other Items |
| 0040-09090 | 1 | Weldment | Other Items |
| 0040-09254 | 1 | Weldment | Other Items |
| 0040-09944 | 1 | Bellows | Other Items |
| 0040-09945 | 1 | Weldment | Other Items |
| 0040-11026 | 1 | Shaft | Other Items |
| 0040-18021 | 1 | Nozzle | Other Items |
| 0040-18078 | 1 | Bellow Weldment | Other Items |
| 0040-20056 | 1 | Adapter, Elbow | Other Items |
| 0040-20142 | 1 | Weldment, Filter | Other Items |
| 0040-20237 | 1 | Temp., Bellows, Assy. | Other Items |
| 0040-20378 | 1 | Bellows | Other Items |
| 0040-21170 | 1 | Clamp | Other Items |
| 0040-22427 | 1 | Extender | Other Items |
| 0040-22488 | 1 | Screw | Other Items |
| 0040-31965 | 1 | Insert, Gas Feed | Other Items |
| 0040-32105 | 1 | E-Chuck | Other Items |
| 0040-32324 | 1 | Wave Guide | Other Items |
| 0040-32409 | 1 | Vent, Plate | Other Items |
| 0040-32436 | 1 | Tuning Elements, Assy. | Other Items |
| 0040-32464 | 1 | Ring, Magnet Lower | Other Items |
| 0040-37333 | 1 | Bracket | Other Items |
| 0040-40050 | 1 | Plate, Front | Other Items |
| 0040-40148 | 1 | Adapter, Straight | Other Items |
| 0050-10046 | 1 | Modified Elbow Weldment | Other Items |
| 0050-10058 | 1 | Valve, Weldment | Other Items |
| 0050-20954 | 1 | Adapter, Gas Line | Other Items |
| 0050-21116 | 1 | Gas Line | Other Items |
| 0050-24438 | 1 | Gas Line | Other Items |
| 0050-30223 | 1 | Weldment | Other Items |
| 0050-30513 | 1 | Weldment, Gas Line | Other Items |
| 0050-36235 | 1 | Valve | Other Items |
| 0050-36238 | 1 | Valve | Other Items |
| 0050-40073 | 1 | Weldment, Final Valve | Other Items |
| 0050-75354 | 1 | Feedthru | Other Items |
| 0060-00215 | 1 | Label, Endpoint Keyboard | Other Items |
| 0060-40040 | 1 | Label, Safety | Other Items |
| 0090-00026 | 1 | Switch | Other Items |
| 0090-00051 | 1 | Fan/Cable, Assy. | Other Items |
| 0090-00053 | 1 | Chill Valve | Other Items |
| 0090-00195 | 1 | Switch, SST | Other Items |
| 0090-09005 | 1 | Actuator, Assy. | Other Items |
| 0090-09035 | 1 | Fan, Assy. | Other Items |
| 0090-09079 | 1 | Harness | Other Items |
| 0090-09141 | 1 | Switch | Other Items |
| 0090-09151 | 1 | High Voltage Contact Electric, Assy | Other Items |
| 0090-09157 | 1 | Cable Assy | Other Items |
| 0090-09162 | 1 | Switch | Other Items |
| 0090-16018 | 1 | Sensor, Assy. | Other Items |
| 0090-20002 | 1 | Motor, Assy. | Other Items |
| 0090-20020 | 1 | Sensor, Hall effect | Other Items |
| 0090-20033 | 1 | Cable, Assy. | Other Items |
| 0090-20133 | 1 | Valve, Assy. | Other Items |
| 0090-20143 | 1 | Photo Sensor, Assy. | Other Items |
| 0090-35052 | 1 | Pyrometer, Assy. | Other Items |
| 0090-36214 | 1 | Switch, Elect. Air Flow | Other Items |
| 0090-39191 | 1 | XDUCER, Assy. | Other Items |
| 0090-40005 | 1 | Loadlock, Assy. | Other Items |
| 0090-40049 | 1 | Light Pen | Other Items |
| 0090-50082 | 1 | Signal Tower | Other Items |
| 0090-76031 | 1 | Sensor Reciever, Assy. | Other Items |
| 0090-76065 | 1 | Motor, Assy. | Other Items |
| 0140-00144 | 1 | Harness, Assy. | Other Items |
| 0140-00145 | 1 | Harness, Assy. | Other Items |
| 0140-09028 | 1 | Harness, Assy. | Other Items |
| 0140-09065 | 1 | Harness | Other Items |
| 0140-09110 | 1 | Cable, Monitor | Other Items |
| 0140-09173 | 1 | Harness, Assy. | Other Items |
| 0140-09197 | 1 | Harness, Assy. | Other Items |
| 0140-09281 | 1 | Harness, Assy. | Other Items |
| 0140-09285 | 1 | Harness, Assy. | Other Items |
| 0140-09291 | 1 | Harness, High Temp Interface | Other Items |
| 0140-09441 | 1 | Harness, Assy. | Other Items |
| 0140-09458 | 1 | Harness | Other Items |
| 0140-09531 | 1 | Harness | Other Items |
| 0140-09661 | 1 | Harness, Assy. | Other Items |
| 0140-09663 | 1 | Harness, Assy. | Other Items |
| 0140-09716 | 1 | Harness, Flow Switch | Other Items |
| 0140-09720 | 1 | Cable, Assy. | Other Items |
| 0140-10051 | 1 | Harness interlock | Other Items |
| 0140-10081 | 1 | Harness | Other Items |
| 0140-18041 | 1 | Harness, Assy. | Other Items |
| 0140-20016 | 1 | Harness Assy. | Other Items |
| 0140-20424 | 1 | Harness, Assy. | Other Items |
| 0140-20515 | 1 | Harness Assy. | Other Items |
| 0140-20517 | 1 | Harness Assy. | Other Items |
| 0140-20783 | 1 | Harness Assy. | Other Items |
| 0140-21416 | 1 | Harness, Assy. | Other Items |
| 0140-35710 | 1 | Harness | Other Items |
| 0140-35732 | 1 | Harness Assy Interconect | Other Items |
| 0140-36067 | 1 | Harness, Assy. | Other Items |
| 0140-70004 | 1 | Harness, Loader | Other Items |
| 0140-76005 | 1 | Harness, Assy. | Other Items |
| 0150-00103 | 1 | Cable, Assy. | Other Items |
| 0150-00238 | 1 | Cable, Assy. | Other Items |
| 0150-00340 | 1 | Cable, Turbo Controller | Other Items |
| 0150-00796 | 1 | Cable | Other Items |
| 0150-09072 | 1 | Cable Leveling | Other Items |
| 0150-09080 | 1 | Liquid, Assy. | Other Items |
| 0150-09087 | 1 | Cable | Other Items |
| 0150-09168 | 1 | Cable, Assy. | Other Items |
| 0150-09208 | 1 | Cable, Assy. | Other Items |
| 0150-09236 | 1 | Cable, Assy. | Other Items |
| 0150-09240 | 1 | Cable, Assy. | Other Items |
| 0150-09397 | 1 | Switch | Other Items |
| 0150-09600 | 1 | Cable, Gas Panel | Other Items |
| 0150-09639 | 1 | Cable, Assy. | Other Items |
| 0150-09640 | 1 | Cable, Assy. | Other Items |
| 0150-09662 | 1 | Cable, Thermalcouple | Other Items |
| 0150-09681 | 1 | Cable, Assy. | Other Items |
| 0150-09701 | 1 | Cable, Assy. | Other Items |
| 0150-09877 | 1 | Cable, ESC | Other Items |
| 0150-09879 | 1 | Cable, ESC | Other Items |
| 0150-09913 | 1 | Cabel, Assy. | Other Items |
| 0150-10051 | 1 | Cable, TC Interlock | Other Items |
| 0150-10188 | 1 | Cable, Assy. | Other Items |
| 0150-10233 | 1 | Cable, Manifold | Other Items |
| 0150-18058 | 1 | Cable, Assy. | Other Items |
| 0150-20140 | 1 | Cable, Assy. | Other Items |
| 0150-20149 | 1 | Cable, Assy. | Other Items |
| 0150-36136 | 1 | Cable, Assy. | Other Items |
| 0150-70001 | 1 | Cable, Assy. | Other Items |
| 0150-70031 | 1 | Cable, Assy. | Other Items |
| 0150-70032 | 1 | Cable, Assy. | Other Items |
| 0150-76198 | 1 | Cable, Assy. | Other Items |
| 0150-90148 | 1 | Fiber Optic Cable | Other Items |
| 0190-00047 | 1 | Flex Cable | Other Items |
| 0190-00872 | 1 | Valve | Other Items |
| 0190-00873 | 1 | Valve | Other Items |
| 0190-09004 | 1 | Lead Screw | Other Items |
| 0190-09026 | 1 | Cable Leveling Head | Other Items |
| 0190-09057 | 1 | Ampule Insulation | Other Items |
| 0190-09066 | 1 | Cable, Assy. | Other Items |
| 0190-09073 | 1 | Diffuser | Other Items |
| 0190-09132 | 1 | Switch | Other Items |
| 0190-09230 | 1 | Switch | Other Items |
| 0190-09254 | 1 | Cable, Assy. | Other Items |
| 0190-09305 | 1 | Tubing, Insulator | Other Items |
| 0190-09514 |