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| Part Number | QTY | Description | Process |
| 0010-75593 | 1 | PCB, Card Cage Assy. | PCB's |
| 0010-76035 | 1 | Assy, N2 Dry Vac Enclosure | PCB's |
| 0010-76858 | 1 | PCB, Detector | PCB's |
| 0090-20088 | 1 | PCB, Cyro Temp A/I Mux. | PCB's |
| 0090-75015 | 1 | PCB, OBS, SBC Synergy | PCB's |
| 0090-76038 | 1 | PCB, Fast Wafer Mapping | PCB's |
| 0090-76109 | 1 | PCB, Electrical Synergy Board | PCB's |
| 0100-00001 | 1 | PCB, DC Power Supply Monitor | PCB's |
| 0100-00014 | 1 | PCB, Opto Detector | PCB's |
| 0100-00066 | 1 | PCB, Emission Detector | PCB's |
| 0100-00070 | 1 | PCB, Blade Sensor | PCB's |
| 0100-00084 | 1 | PCB, Cap Sensor Amp | PCB's |
| 0100-00116 | 1 | PCB, Wrist Interconnect Board | PCB's |
| 0100-00127 | 1 | PCB, VME D-Ram | PCB's |
| 0100-00149 | 1 | PCB, Blade Sensor | PCB's |
| 0100-00161 | 1 | PCB, Monochromator Interconnection | PCB's |
| 0100-00322 | 1 | PCB, AC Intercon. | PCB's |
| 0100-09012 | 1 | PCB, Power Supply Backplane | PCB's |
| 0100-09020 | 1 | PCB, Fuse Board Assembly | PCB's |
| 0100-09020 | 1 | PCB, Fuse Board Assembly | PCB's |
| 0100-09023 | 1 | PCB, Mini DI/DO Assembly | PCB's |
| 0100-09033 | 1 | PCB, TC Amplifier Board | PCB's |
| 0100-09041 | 1 | PCB, Heat Exchanger Inter. | PCB's |
| 0100-09046 | 1 | PCB, Ozonator Volt Regulator Assy. | PCB's |
| 0100-09054 | 1 | PCB, Analog Input | PCB's |
| 0100-09062 | 1 | PCB, Endpoint | PCB's |
| 0100-09084 | 1 | PCB, Monitor | PCB's |
| 0100-09109 | 1 | PCB, REV F | PCB's |
| 0100-09131 | 1 | PCB, Fluid Overfill Board | PCB's |
| 0100-09131 | 1 | PCB, Fluid Overfill Board | PCB's |
| 0100-09135 | 1 | PCB, Endpoint Board | PCB's |
| 0100-09169 | 1 | PCB, Expanded Control Assy. | PCB's |
| 0100-09177 | 1 | PCB, Ext VME AI/O DI/O | PCB's |
| 0100-09196 | 1 | PCB, E-Chuck Controller | PCB's |
| 0100-09205 | 1 | PCB, Interconnect Board | PCB's |
| 0100-09223 | 1 | PCB, MAG GEN Interface Board | PCB's |
| 0100-09226 | 1 | PCB, MCVD Endpoint Board | PCB's |
| 0100-09246 | 1 | PCB, System I/O Distribution Board | PCB's |
| 0100-09254 | 1 | PCB, Endpoint Select 1 | PCB's |
| 0100-09279 | 1 | PCB, Assy. | PCB's |
| 0100-09307 | 1 | PCB, Relay DTLR Interlocking | PCB's |
| 0100-09381 | 1 | Assy PCB Interconect | PCB's |
| 0100-09390 | 1 | PCB, AC Interconnect | PCB's |
| 0100-11001 | 1 | PCB, Analog Output | PCB's |
| 0100-11002 | 1 | PCB, Digital DI/DO | PCB's |
| 0100-18044 | 1 | PCB, Htr. Contactor | PCB's |
| 0100-20006 | 1 | PCB, Chamber Driver Backplane | PCB's |
| 0100-20008 | 1 | PCB, Cryo Temp Intercon. | PCB's |
| 0100-20012 | 1 | PCB, Isolation Amp. | PCB's |
| 0100-20012 | 1 | PCB, Isolation Amp. | PCB's |
| 0100-20038 | 1 | PCB, Relay Control | PCB's |
| 0100-20070 | 1 | PCB, System AC | PCB's |
| 0100-20078 | 1 | PCB, Laser Driver | PCB's |
| 0100-20145 | 1 | PCB, Assy. | PCB's |
| 0100-20152 | 1 | PCB, System Expansion | PCB's |
| 0100-20153 | 1 | PCB, Mainframe System Expansion | PCB's |
| 0100-20154 | 1 | PCB, SMIFArm | PCB's |
| 0100-20163 | 1 | PCB, Serial/Video Interconnect BD. | PCB's |
| 0100-20169 | 1 | PCB, Wafer Map LED | PCB's |
| 0100-20191 | 1 | PCB, Assy. PC | PCB's |
| 0100-20199 | 1 | PCB, Smoke Detector Interface | PCB's |
| 0100-20217 | 1 | PCB, Assy. DI/O Distribution BD | PCB's |
| 0100-20237 | 1 | PCB, Direct Chamber Assy. | PCB's |
| 0100-20265 | 1 | PCB, Filter Vacuum Relay | PCB's |
| 0100-20313 | 1 | PCB, Interconnect | PCB's |
| 0100-35024 | 1 | PCB, Centerfinder SBC Assy. | PCB's |
| 0100-35049 | 1 | PCB, Interlock Board | PCB's |
| 0100-35057 | 1 | PCB, Gas Panel Dist. | PCB's |
| 0100-35064 | 1 | PCB, AC Distribution Assy. | PCB's |
| 0100-35084 | 1 | PCB, DIO Backplane | PCB's |
| 0100-35103 | 1 | PCB, MAG GEN Interface Board | PCB's |
| 0100-35125 | 1 | PCB, RF Peak Detector | PCB's |
| 0100-35192 | 1 | PCB, DPS Maintenance Control | PCB's |
| 0100-35216 | 1 | PCB, TC Interface DPS | PCB's |
| 0100-35248 | 1 | PCB, TC Interlock | PCB's |
| 0100-35250 | 1 | PCB, Interface Chamber Board | PCB's |
| 0100-70019 | 1 | PCB, Intelligent Interface | PCB's |
| 0100-76001 | 1 | PCB, CCD Board, Assy. | PCB's |
| 0100-76061 | 1 | PCB, System Elect. | PCB's |
| 0100-76083 | 1 | PCB, Serial/Video Distributor Board | PCB's |
| 0100-77002 | 1 | PCB, Electrical System Assy. | PCB's |
| 0100-90377 | 1 | PCB, Assy. | PCB's |
| 0100-90517 | 1 | PCB, PWBA Back Controller Board | PCB's |
| 0100-90704 | 1 | PCB, PWBA T.E.M., Signal Divider | PCB's |
| 0100-90812 | 1 | PCB, PWBA Wafer, Orienter | PCB's |
| 0100-91023 | 1 | PCB, Micro Discharge | PCB's |
| 0190-09547 | 1 | PCB, VME Seriplex | PCB's |
| 0190-09667 | 1 | PCB, Synergy | PCB's |
| 0190-13065 | 1 | PCB, VGA Video Controller Board | PCB's |
| 0190-35207 | 1 | Assy., PCB, HTF Chamber Interfa | PCB's |
| 0190-35216 | 1 | PCB, Chamber Interface Board | PCB's |
| 0190-35278 | 1 | PCB, Interface | PCB's |
| 0190-40045 | 1 | PCB, VME | PCB's |
| 0190-70108 | 1 | PCB, MXP Chamber Interface Board | PCB's |
| 0190-70109 | 1 | PCB, ASP Intercon | PCB's |
| 0190-76043 | 1 | PCB, SBC Synergy | PCB's |
| 0190-76262 | 1 | PCB, Assy. | PCB's |
| 0190-77062 | 1 | Digital I/O, PCB | PCB's |
| 0224-01774 | 1 | PCB, RF On DxZ/HDP | PCB's |
| 0224-43496 | 1 | PCB for 6 TYLAN MFC's | PCB's |
| 0225-34457 | 1 | PCB, Modified N-Dryvac Distribution | PCB's |
| 0226-30332 | 1 | PCB, MOD.N2 Dryvac | PCB's |
| 03-81891-00 | 1 | PCB, Isolation Lamp | PCB's |
| 0300-09055 | 1 | PCB, Prom Kit Assy. | PCB's |
| 0660-01102 | 1 | PCB, Turbo Interconnect | PCB's |
| 0660-01418 | 1 | PCB, Card APC Digital I/O | PCB's |
| 0090-75016 | 2 | PCB, VME SBC Synergy Board | PCB's |
| 0100-09102 | 2 | PCB, Controller Dist. | PCB's |
| 0100-09134 | 2 | PCB, DIO Fuse Board | PCB's |
| 0100-09203 | 2 | PCB, Mag Phase | PCB's |
| 0100-20034 | 2 | PCB, 15 V Monitor | PCB's |
| 0100-20040 | 2 | PCB, Remote Supply Distribution | PCB's |
| 0100-20054 | 2 | PCB, Mainframe Interconnect Board | PCB's |
| 0100-20063 | 2 | PCB, TC Gauge | PCB's |
| 0100-20064 | 2 | PCB, SBC Input/Output Assy. | PCB's |
| 0100-20073 | 2 | PCB, LLBL Detector | PCB's |
| 0100-20075 | 2 | PCB, Gas Panel Interface | PCB's |
| 0100-20086 | 2 | PCB, Wafer Map LED | PCB's |
| 0100-20147 | 2 | PCB, Dual Degas Lift | PCB's |
| 0100-20318 | 2 | PCB, TC Isolation Amp. | PCB's |
| 0100-20371 | 2 | PCB, Wafer Box Interlock Status | PCB's |
| 0100-35038 | 2 | PCB, Gas Leak Display | PCB's |
| 0100-35230 | 2 | PCB, TC Amp. Interface | PCB's |
| 0100-35318 | 2 | PCB, Gas Panel Dist. | PCB's |
| 0100-76053 | 2 | PCB, Robot Interconnect Assy. | PCB's |
| 0190-09085 | 2 | PCB, 60 EV | PCB's |
| 0190-20048 | 2 | PCB, Synergy Board | PCB's |
| 0300-20022 | 2 | PCB, Boss Synergy | PCB's |
| 0010-20407 | 3 | PCB, LLBL Detector | PCB's |
| 0100-00114 | 3 | PCB, Gripper | PCB's |
| 0100-00153 | 3 | PCB Assembly, CCD Adapter | PCB's |
| 0100-00160 | 3 | PCB, Stepper Controller | PCB's |
| 0100-09090 | 3 | PCB, Fiber Optic Video Link Assy. | PCB's |
| 0100-09283 | 3 | PCB, Stepper Driver | PCB's |
| 0100-09293 | 3 | PCB, Assy. | PCB's |
| 0100-09321 | 3 | PCB, Assy. | PCB's |
| 0100-20012 | 3 | PCB, Isolation Amp. | PCB's |
| 0100-20051 | 3 | PCB, Turbo Interconnect | PCB's |
| 0100-20100 | 3 | PCB, AI / AO | PCB's |
| 0100-35064 | 3 | PCB, AC Distribution Assy. | PCB's |
| 0100-35353 | 3 | PCB, Stepper Motor Driver Interface | PCB's |
| 0660-01070 | 3 | PCB, Card Electro | PCB's |
| 0100-00426 | 4 | PCB, Assy. MCVD Dual TC Amp | PCB's |
| 0100-09040 | 4 | PCB, SSR AC Control | PCB's |
| 0100-09245 | 4 | PCB, Assy. | PCB's |
| 0660-01058 | 4 | PCB, Assy. | PCB's |
| 0100-01012 | 5 | PCB, DO Fuse | PCB's |
| 0100-14004 | 5 | PCB, VME Extender | PCB's |
| 0100-70028 | 5 | PCB, Robot Interconnect | PCB's |
| 0100-00011 | 6 | PCB, Chopper Driver Board | PCB's |
| 0100-09085 | 6 | PCB, Assy. LVDT Voltage Regulato | PCB's |
| 0100-35236 | 7 | PCB, Endpoint Selection | PCB's |
| 0100-76124 | 7 | PCB, Digital Input Output | PCB's |
| 0100-09038 | 8 | PCB, DC Bias Divider | PCB's |
| 0660-01592 | 8 | PCB, Bay Pneumatic | PCB's |
| 0660-01763 | 8 | PCB, Assy. | PCB's |
| 0100-20157 | 9 | PCB, Loader Mainframe Interconnect | PCB's |
| 0100-70015 | 9 | PCB, Gate Valve Interconnect | PCB's |
| 0100-09255 | 10 | PCB, TC Interconnect | PCB's |
| 0100-09032 | 15 | PCB, TC Filter | PCB's |
| 0100-09117 | 18 | PCB, DI/O Fuse | PCB's |
| 0100-20003 | 26 | PCB, Digital I/O | PCB's |
| 0100-13010 | 32 | PCB, Opto Switch | PCB's |