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| Part Number | QTY | Description | Process |
| 0010-13235 | 1 | Motorized Lift, Assy. | PVD |
| 0010-13629 | 1 | Motorized Lift, Assy. | PVD |
| 0010-20079 | 1 | Chamber Driver Assy. | PVD |
| 0010-20138 | 1 | TC Assy. | PVD |
| 0010-20138 | 1 | TC Assy. | PVD |
| 0010-20138 | 1 | TC Assy. | PVD |
| 0010-20163 | 1 | Shield, Chamber | PVD |
| 0010-20230 | 1 | Orientor, Lift | PVD |
| 0010-20252 | 1 | Orientor Rotation, Assy. | PVD |
| 0010-20291 | 1 | Detector, Assy. | PVD |
| 0010-20348 | 1 | Water Leak Detector, Assy. | PVD |
| 0010-20358 | 1 | Monolith Double, Assy. | PVD |
| 0010-21154 | 1 | Interface, Pump Box | PVD |
| 0010-21716 | 1 | Shield | PVD |
| 0015-20035 | 1 | Screw | PVD |
| 0020-20117 | 1 | Conductor, Flex DC Bias | PVD |
| 0020-20123 | 1 | Heater Isolator | PVD |
| 0020-20125 | 1 | Hub, Heater Cassette | PVD |
| 0020-20126 | 1 | Stand-Off, Ceramic | PVD |
| 0020-20320 | 1 | Lifter, 200 mm | PVD |
| 0020-20323 | 1 | Chuck | PVD |
| 0020-20524 | 1 | Hub, Left Corner Cover | PVD |
| 0020-20558 | 1 | Blank Slit Valve | PVD |
| 0020-20586 | 1 | Insert | PVD |
| 0020-20627 | 1 | Block, Mounting | PVD |
| 0020-20672 | 1 | Chamber Plug, Monolith | PVD |
| 0020-20770 | 1 | Stage Cassette | PVD |
| 0020-20942 | 1 | Shield, 200 mm | PVD |
| 0020-20943 | 1 | Shield, Top 125-150 mm | PVD |
| 0020-20944 | 1 | Shield, Top 200 mm | PVD |
| 0020-21112 | 1 | Clamp | PVD |
| 0020-21114 | 1 | Blade | PVD |
| 0020-21286 | 1 | Clamp Ring, 150 mm | PVD |
| 0020-21364 | 1 | Clamp Ring | PVD |
| 0020-21453 | 1 | Clamp Ring , 150 mm | PVD |
| 0020-21465 | 1 | Shield | PVD |
| 0020-21665 | 1 | Wafer Shield | PVD |
| 0020-21705 | 1 | Lifter | PVD |
| 0020-21725 | 1 | Insulator, Preclean | PVD |
| 0020-21728 | 1 | Seal Ring, Preclean | PVD |
| 0020-21747 | 1 | Insulator, Spacer | PVD |
| 0020-21754 | 1 | Pocket Plate, 150 mm | PVD |
| 0020-21759 | 1 | Shield Cover, 150 mm | PVD |
| 0020-21866 | 1 | Shield, 200 mm | PVD |
| 0020-21893 | 1 | Shield | PVD |
| 0020-21901 | 1 | Bracket | PVD |
| 0020-21917 | 1 | Pocket Plate, 200 mm | PVD |
| 0020-22215 | 1 | Pocket Plate | PVD |
| 0020-22223 | 1 | Pocket Plate, Preclean | PVD |
| 0020-22223 | 1 | Pocket Plate, Preclean | PVD |
| 0020-22291 | 1 | Shield | PVD |
| 0020-22292 | 1 | Shield, 150 mm | PVD |
| 0020-22292 | 1 | Shield, 150 mm | PVD |
| 0020-22476 | 1 | Susceptor | PVD |
| 0020-22529 | 1 | Plate, 200 mm | PVD |
| 0020-22647 | 1 | Shield | PVD |
| 0020-22658 | 1 | Lifter, Hi Temp 150 mm | PVD |
| 0020-22671 | 1 | Adaptor,13" Source shutter | PVD |
| 0020-22674 | 1 | Holder, Magnet Source | PVD |
| 0020-22802 | 1 | Shield | PVD |
| 0020-22814 | 1 | Clamp Ring | PVD |
| 0020-22844 | 1 | Shield | PVD |
| 0020-22852 | 1 | Shield, Preclean 200 mm | PVD |
| 0020-22975 | 1 | Insulator | PVD |
| 0020-22993 | 1 | Cover Plate | PVD |
| 0020-23041 | 1 | Clamp Shield, 200 mm | PVD |
| 0020-23075 | 1 | Shield, Upper | PVD |
| 0020-23138 | 1 | Bracket Sensor | PVD |
| 0020-23165 | 1 | Bracket, Connector | PVD |
| 0020-23180 | 1 | Pedestal | PVD |
| 0020-23354 | 1 | Insulator, Quartz | PVD |
| 0020-23354 | 1 | Insulator, Quartz | PVD |
| 0020-23355 | 1 | Pedestal | PVD |
| 0020-23478 | 1 | Sheild, Heater | PVD |
| 0020-23494 | 1 | Honey Comb Collimator | PVD |
| 0020-23635 | 1 | Lift Hoop 6" | PVD |
| 0020-23922 | 1 | Shaft | PVD |
| 0020-24090 | 1 | Shield | PVD |
| 0020-24092 | 1 | Connector Heater Sheild | PVD |
| 0020-24095 | 1 | Pedestal | PVD |
| 0020-24456 | 1 | Insulator, Quartz 150 mm | PVD |
| 0020-24768 | 1 | Flange | PVD |
| 0020-24804 | 1 | Cover Ring | PVD |
| 0020-25071 | 1 | Clamp Ring | PVD |
| 0020-25255 | 1 | Shutter Blade | PVD |
| 0020-25257 | 1 | Insulator Qtz | PVD |
| 0020-25730 | 1 | Shield, Upper | PVD |
| 0020-25731 | 1 | Shield, Adaptor | PVD |
| 0020-25826 | 1 | Pedestal, Cover 150 mm | PVD |
| 0020-25920 | 1 | Shield, Lower | PVD |
| 0020-26158 | 1 | Clamping Ring | PVD |
| 0020-26394 | 1 | Shield | PVD |
| 0020-27123 | 1 | Pedestal, PC II | PVD |
| 0020-27275 | 1 | Clamp Ring | PVD |
| 0020-28937 | 1 | Pedestal Cover, 200 mm | PVD |
| 0020-29836 | 1 | Clamp | PVD |
| 0020-29966 | 1 | Clamp Ring | PVD |
| 0020-70285 | 1 | Blade | PVD |
| 0021-20390 | 1 | Blade, 8" | PVD |
| 0021-20744 | 1 | Bracket, DC Blankoff | PVD |
| 0021-20788 | 1 | Cover Shield | PVD |
| 0021-21910 | 1 | Clamp Ring | PVD |
| 0021-70220 | 1 | Deposition Ring | PVD |
| 0021-76309 | 1 | Cover, Adjustable | PVD |
| 0040-20223 | 1 | Dome, Preclean | PVD |
| 0040-20284 | 1 | Bell Jar, Preclean | PVD |
| 0040-20284 | 1 | Bell Jar, Preclean | PVD |
| 0040-20418 | 1 | Bellows, Slit Valve Assy. | PVD |
| 0040-21897 | 1 | Bell Jar, W/Handle Preclean II | PVD |
| 0040-21985 | 1 | Bracket | PVD |
| 0040-22487 | 1 | Finger | PVD |
| 0040-22573 | 1 | Shutter, Hoop | PVD |
| 0040-23466 | 1 | Blankoff DC Connector | PVD |
| 0050-26291 | 1 | Adapter | PVD |
| 0190-76244 | 1 | Dual Chamber Driver | PVD |
| 0200-00221 | 1 | Qtz. Insulator | PVD |
| 0200-20030 | 1 | Dome, Qtz. | PVD |
| 0200-20055 | 1 | Insulator, Quartz | PVD |
| 0200-20055 | 1 | Insulator, Quartz | PVD |
| 0200-20064 | 1 | Insulator, Qtz. | PVD |
| 0200-20163 | 1 | Insulator, Lamp | PVD |
| 0200-20215 | 1 | Housing | PVD |
| 0200-20285 | 1 | Pedestal Cover | PVD |
| 0200-20331 | 1 | Cover Ring | PVD |
| 0200-36122 | 1 | Isolator | PVD |
| 0240-20147 | 1 | Optics Orientor Kit | PVD |
| 0240-20551 | 1 | Sheild, Kit | PVD |
| 0240-25798 | 1 | Kit, Hoop Orientor Degas | PVD |
| 0240-26537 | 1 | Kit, Water Box | PVD |
| 0240-27013 | 1 | Kit, Cryo Sheild | PVD |
| 0240-28574 | 1 | Kit, Tin Turbo Adapter | PVD |
| 0240-71201 | 1 | Kit, Cryo Shield | PVD |
| 0240-71210 | 1 | Kit, Cryo Pump | PVD |
| 0240-76245 | 1 | Kit, Heater Hub | PVD |
| 0240-76301 | 1 | Pneumatic Lift, Assy. | PVD |
| 0010-20441 | 2 | RF Match | PVD |
| 0010-21409 | 2 | Thermal Switch | PVD |
| 0010-21678 | 2 | Kit, 6" Shield ADV 101 x Vectra | PVD |
| 0010-76136 | 2 | Lift, Assy. | PVD |
| 0010-76697 | 2 | 5500 Right Assy. | PVD |
| 0020-20113 | 2 | DC Bias Shield, Assy. | PVD |
| 0020-20113 | 2 | DC Bias Shield, Assy. | PVD |
| 0020-20114 | 2 | Isolator, DC Bias | PVD |
| 0020-20401 | 2 | Flange | PVD |
| 0020-20626 | 2 | Block, Mounting | PVD |
| 0020-20666 | 2 | Lifter, Thermal Insulator | PVD |
| 0020-20962 | 2 | Clamp Ring, 200 mm | PVD |
| 0020-21144 | 2 | Insert Pedestal | PVD |
| 0020-21148 | 2 | Hoop Cover | PVD |
| 0020-21200 | 2 | Cover Shield, Preclean | PVD |
| 0020-21366 | 2 | Screw, Shoulder | PVD |
| 0020-21463 | 2 | Shield | PVD |
| 0020-21464 | 2 | Shield | PVD |
| 0020-21738 | 2 | Hoop, Preclean 200 mm | PVD |
| 0020-21754 | 2 | Pocket Plate, 150 mm | PVD |
| 0020-21754 | 2 | Pocket Plate, 150 mm | PVD |
| 0020-21759 | 2 | Shield Cover, 150 mm | PVD |
| 0020-21863 | 2 | Shim | PVD |
| 0020-21893 | 2 | Shield | PVD |
| 0020-22270 | 2 | Finger, 150 mm Preclean | PVD |
| 0020-22275 | 2 | Cover | PVD |
| 0020-22493 | 2 | Clamp Shield | PVD |
| 0020-22805 | 2 | Adapter Plate | PVD |
| 0020-22906 | 2 | Pin, Preclean Pedestal | PVD |
| 0020-23585 | 2 | Shield | PVD |
| 0020-23836 | 2 | Plate | PVD |
| 0020-24091 | 2 | Leg Heater | PVD |
| 0020-24095 | 2 | Pedestal | PVD |
| 0020-26158 | 2 | Clamping Ring | PVD |
| 0020-26218 | 2 | Pedestal | PVD |
| 0020-26578 | 2 | Clamp, 4 Point | PVD |
| 0020-26588 | 2 | Shield | PVD |
| 0020-27812 | 2 | Pin Alignment | PVD |
| 0020-29125 | 2 | Shield | PVD |
| 0020-29836 | 2 | Clamp | PVD |
| 0020-29946 | 2 | Coil | PVD |
| 0040-21178 | 2 | Bell Jar, Preclean II | PVD |
| 0040-21464 | 2 | Lift Hoop, Modified | PVD |
| 0200-20056 | 2 | Insulator, TI Pedestal | PVD |
| 0200-20162 | 2 | Insulator | PVD |
| 0200-20210 | 2 | Insert, Double Connector | PVD |
| 0200-35595 | 2 | Liner, Lid TXZ | PVD |
| 0200-36122 | 2 | Isolator | PVD |
| 0240-20752 | 2 | Kit, Automated Load Lock | PVD |
| 0242-13897 | 2 | Kit, Ceramic Insulator | PVD |
| 0010-20300 | 3 | Lift, Assy. | PVD |
| 0010-21720 | 3 | Shield | PVD |
| 0015-20035 | 3 | Screw | PVD |
| 0020-20126 | 3 | Stand-Off, Ceramic | PVD |
| 0020-20295 | 3 | Frame, Source 11.30" | PVD |
| 0020-20897 | 3 | Socket Retainer | PVD |
| 0020-21320 | 3 | Clamp Ring, Collimator 200 mm | PVD |
| 0020-21755 | 3 | Outer Ring, 150 mm | PVD |
| 0020-21900 | 3 | Shield, 200 mm | PVD |
| 0020-22196 | 3 | Pedestal, 200 mm | PVD |
| 0020-22215 | 3 | Pocket Plate | PVD |
| 0020-23043 | 3 | Shield, Upper Tin | PVD |
| 0020-25730 | 3 | Shield, Upper | PVD |
| 0020-25731 | 3 | Shield, Adaptor | PVD |
| 0020-26439 | 3 | Shield, Lower | PVD |
| 0020-27805 | 3 | Shutter Disc | PVD |
| 0020-29343 | 3 | Shield, Clamp | PVD |
| 0020-29966 | 3 | Clamp Ring | PVD |
| 0021-20042 | 3 | Shutter Disk | PVD |
| 0040-09817 | 3 | Vertrel Flush Heater | PVD |
| 0040-21178 | 3 | Bell Jar, Preclean II | PVD |
| 0200-20001 | 3 | Door, Preclean | PVD |
| 0200-20002 | 3 | Insulator, Quartz | PVD |
| 0020-20114 | 4 | Isolator, DC Bias | PVD |
| 0020-20349 | 4 | Duplex Clamp, Frog Leg Blade | PVD |
| 0020-20460 | 4 | Base Handle Adaptor | PVD |
| 0020-20521 | 4 | Spacer, Insulator Lifter | PVD |
| 0020-22862 | 4 | Hub, Shutter DC Bias | PVD |
| 0020-23355 | 4 | Pedestal | PVD |
| 0020-24594 | 4 | Reflector | PVD |
| 0020-25313 | 4 | Flange, Upper Bellows | PVD |
| 0020-29684 | 4 | Insulator, Dual Input | PVD |
| 0040-20614 | 4 | Collimator | PVD |
| 0040-21342 | 4 | Collimator | PVD |
| 0090-20108 | 4 | Sensor, Assy, | PVD |
| 0200-20217 | 4 | Feedthru, Labyrinth | PVD |
| 3250-01029 | 4 | Container, CVD SST 1.2 Ltr. | PVD |
| 0020-20986 | 5 | Shield, Pedestal | PVD |
| 0020-21366 | 5 | Screw, Shoulder | PVD |
| 0020-23041 | 5 | Clamp Shield, 200 mm | PVD |
| 0020-24011 | 5 | Finger Holder | PVD |
| 0040-21178 | 5 | Bell Jar, Preclean II | PVD |
| 0200-20005 | 5 | Shield, Quartz | PVD |
| 0020-20971 | 6 | Spacer, Tin | PVD |
| 0020-23065 | 6 | Pedestal | PVD |
| 0020-25895 | 6 | Insulator, Lamp Cover Right | PVD |
| 0020-29342 | 6 | Feedthur Nut | PVD |
| 3690-01089 | 6 | Screw | PVD |
| 0010-20224 | 7 | Magnet, assy. 11.3" AL | PVD |
| 0020-22010 | 7 | Cap, Lamp | PVD |
| 0200-20170 | 7 | Cap, Coil Support | PVD |
| 0020-22906 | 8 | Pin, Preclean Pedestal | PVD |
| 0020-26906 | 8 | Shield | PVD |
| 0020-23045 | 9 | Shield, 101% Tin | PVD |
| 0020-27100 | 9 | Clamp,150 mm 4 Pad | PVD |
| 0020-21758 | 10 | Finger, 150 mm | PVD |
| 0040-20048 | 10 | Feed Thru, Lamp | PVD |
| 0020-23560 | 11 | Shim | PVD |
| 0020-24387 | 11 | Pedestal, 150 mm | PVD |
| 0040-20048 | 11 | Feed Thru, Lamp | PVD |
| 0020-22906 | 13 | Pin, Preclean Pedestal | PVD |
| 0020-25917 | 14 | Isolator, DC Bias | PVD |
| 0020-26578 | 14 | Clamp, 4 Point | PVD |
| 0200-00221 | 15 | Qtz. Insulator | PVD |
| 0020-23355 | 16 | Pedestal | PVD |
| 0200-20004 | 16 | Antenna Flake | PVD |
| 0200-20137 | 19 | Pin, Insulator | PVD |
| 0010-21952 | 20 | Short Monitor, Non Collimated | PVD |
| 0200-00221 | 20 | Qtz. Insulator | PVD |
| 0200-00221 | 20 | Qtz. Insulator | PVD |
| 0020-20119 | 21 | Pad, DC bias | PVD |
| 0020-21744 | 22 | Finger, 200 mm | PVD |
| 0020-21753 | 22 | Finger, 150 mm | PVD |
| 0020-23587 | 22 | Spacer | PVD |
| 0020-24018 | 22 | Pin, Poly Si Qtz. Insulator | PVD |
| 0020-21118 | 24 | Insert | PVD |
| 0020-24386 | 24 | Cover, 150 mm | PVD |
| 0020-28789 | 33 | Spacer, Feed Thru Seal | PVD |
| 0020-21744 | 44 | Finger, 200 mm | PVD |